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- W2036681914 abstract "Polarization interference metrology of the optical fields' transverse correlation function and its amplitude and phase statistical moments are discussed. Examples of application of such a metrology to the problem of surface roughness diagnostics are also presented.© (1997) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only." @default.
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- W2036681914 date "1997-04-01" @default.
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- W2036681914 title "<title>Polarization interference metrology for statistical parameters of optical fields</title>" @default.
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- W2036681914 doi "https://doi.org/10.1117/12.271837" @default.
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