Matches in SemOpenAlex for { <https://semopenalex.org/work/W2036691389> ?p ?o ?g. }
Showing items 1 to 48 of
48
with 100 items per page.
- W2036691389 abstract "We have extended measurable pressure range of the thin film Pirani vacuum sensor that is still sensitive above 1×105 Pa (1 atmosphere). In our thin film Pirani vacuum sensor, our proposed temperature difference sensor of the short circuit Seebeck-current detection type thermocouple is used in order to get extremely high sensitivity, especially both in very low pressure range and in higher pressure range than 1×104 Pa. In our new pressure sensor the cantilever type sensing region, in which a microheater and two thermocouples are formed to measure the temperature difference, is adopted. Therefore, we can use the null method to measure very small pressure accurately in the high vacuum range (low pressure range). On the other hand in the higher pressure than 1×104 Pa., we could expand the pressure range by adoption of the vibration of the sensing cantilever based on the sudden heating due to the exchange of heater driving. We have achieved much wider measurable pressure range over 8 digits by use of our new simple thin film Pirani vacuum sensor than that of the traditional one." @default.
- W2036691389 created "2016-06-24" @default.
- W2036691389 creator A5007918106 @default.
- W2036691389 creator A5058998684 @default.
- W2036691389 date "2009-01-01" @default.
- W2036691389 modified "2023-09-25" @default.
- W2036691389 title "Wide Pressure Range Measurement due to the Exchange of Heater Driving of the Temperature Difference Sensor" @default.
- W2036691389 cites W1990311671 @default.
- W2036691389 cites W2091546315 @default.
- W2036691389 cites W2141411372 @default.
- W2036691389 cites W2152735110 @default.
- W2036691389 doi "https://doi.org/10.1541/ieejsmas.129.444" @default.
- W2036691389 hasPublicationYear "2009" @default.
- W2036691389 type Work @default.
- W2036691389 sameAs 2036691389 @default.
- W2036691389 citedByCount "0" @default.
- W2036691389 crossrefType "journal-article" @default.
- W2036691389 hasAuthorship W2036691389A5007918106 @default.
- W2036691389 hasAuthorship W2036691389A5058998684 @default.
- W2036691389 hasConcept C127413603 @default.
- W2036691389 hasConcept C159985019 @default.
- W2036691389 hasConcept C171146098 @default.
- W2036691389 hasConcept C192562407 @default.
- W2036691389 hasConcept C204323151 @default.
- W2036691389 hasConcept C39432304 @default.
- W2036691389 hasConceptScore W2036691389C127413603 @default.
- W2036691389 hasConceptScore W2036691389C159985019 @default.
- W2036691389 hasConceptScore W2036691389C171146098 @default.
- W2036691389 hasConceptScore W2036691389C192562407 @default.
- W2036691389 hasConceptScore W2036691389C204323151 @default.
- W2036691389 hasConceptScore W2036691389C39432304 @default.
- W2036691389 hasLocation W20366913891 @default.
- W2036691389 hasOpenAccess W2036691389 @default.
- W2036691389 hasPrimaryLocation W20366913891 @default.
- W2036691389 hasRelatedWork W1964242416 @default.
- W2036691389 hasRelatedWork W2033531242 @default.
- W2036691389 hasRelatedWork W2137409234 @default.
- W2036691389 hasRelatedWork W2296083146 @default.
- W2036691389 hasRelatedWork W2595978771 @default.
- W2036691389 hasRelatedWork W2899084033 @default.
- W2036691389 hasRelatedWork W3189275896 @default.
- W2036691389 hasRelatedWork W4292387292 @default.
- W2036691389 hasRelatedWork W4318819646 @default.
- W2036691389 hasRelatedWork W4352997040 @default.
- W2036691389 isParatext "false" @default.
- W2036691389 isRetracted "false" @default.
- W2036691389 magId "2036691389" @default.
- W2036691389 workType "article" @default.