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• W2036691788 endingPage "207" @default.
• W2036691788 startingPage "205" @default.
• W2036691788 abstract "Silicon carbide nitride (SiCN) films were deposited on p-Si (100) substrates by dual ion beam reactive sputtering deposition with various assisting ion beam energies at room temperature. X-ray diffraction, scanning electron microscopy, energy dispersive spectroscopy, Fourier transform infrared spectroscopy, and Raman scattering measurement were used to investigate the properties of the films. Results show that an increase in assisting ion beam energy remarkably influences film composition. The effects of assisting ion beam energy on chemical structure and photoluminescence properties and their interplays in SiCN films are discussed in detail." @default.
• W2036691788 created "2016-06-24" @default.
• W2036691788 creator A5011264288 @default.
• W2036691788 creator A5033272629 @default.
• W2036691788 creator A5052777211 @default.
• W2036691788 creator A5072112023 @default.
• W2036691788 creator A5082383686 @default.
• W2036691788 creator A5086223919 @default.
• W2036691788 creator A5088550582 @default.
• W2036691788 date "2014-03-01" @default.
• W2036691788 modified "2023-10-17" @default.
• W2036691788 title "Structure and photoluminescence properties of SiCN films grown by dual ion beam reactive sputtering deposition" @default.
• W2036691788 cites W1978908086 @default.
• W2036691788 cites W1986824746 @default.
• W2036691788 cites W1987772272 @default.
• W2036691788 cites W1997436813 @default.
• W2036691788 cites W2014487562 @default.
• W2036691788 cites W2015550378 @default.
• W2036691788 cites W2021664045 @default.
• W2036691788 cites W2021971737 @default.
• W2036691788 cites W2022761333 @default.
• W2036691788 cites W2027164067 @default.
• W2036691788 cites W2028816787 @default.
• W2036691788 cites W2029664002 @default.
• W2036691788 cites W2029682050 @default.
• W2036691788 cites W2032342335 @default.
• W2036691788 cites W2045171985 @default.
• W2036691788 cites W2046070327 @default.
• W2036691788 cites W2047805989 @default.
• W2036691788 cites W2048353482 @default.
• W2036691788 cites W2052979318 @default.
• W2036691788 cites W2058272047 @default.
• W2036691788 cites W2059354439 @default.
• W2036691788 cites W2061991606 @default.
• W2036691788 cites W2074535539 @default.
• W2036691788 cites W2075263950 @default.
• W2036691788 cites W2095183611 @default.
• W2036691788 doi "https://doi.org/10.1016/j.vacuum.2013.08.016" @default.
• W2036691788 hasPublicationYear "2014" @default.
• W2036691788 type Work @default.
• W2036691788 sameAs 2036691788 @default.
• W2036691788 citedByCount "15" @default.
• W2036691788 countsByYear W20366917882015 @default.
• W2036691788 countsByYear W20366917882016 @default.
• W2036691788 countsByYear W20366917882017 @default.
• W2036691788 countsByYear W20366917882018 @default.
• W2036691788 countsByYear W20366917882019 @default.
• W2036691788 countsByYear W20366917882020 @default.
• W2036691788 countsByYear W20366917882021 @default.
• W2036691788 crossrefType "journal-article" @default.
• W2036691788 hasAuthorship W2036691788A5011264288 @default.
• W2036691788 hasAuthorship W2036691788A5033272629 @default.
• W2036691788 hasAuthorship W2036691788A5052777211 @default.
• W2036691788 hasAuthorship W2036691788A5072112023 @default.
• W2036691788 hasAuthorship W2036691788A5082383686 @default.
• W2036691788 hasAuthorship W2036691788A5086223919 @default.
• W2036691788 hasAuthorship W2036691788A5088550582 @default.
• W2036691788 hasConcept C113196181 @default.
• W2036691788 hasConcept C120665830 @default.
• W2036691788 hasConcept C121332964 @default.
• W2036691788 hasConcept C145148216 @default.
• W2036691788 hasConcept C151730666 @default.
• W2036691788 hasConcept C159985019 @default.
• W2036691788 hasConcept C160892712 @default.
• W2036691788 hasConcept C169573571 @default.
• W2036691788 hasConcept C171250308 @default.
• W2036691788 hasConcept C178790620 @default.
• W2036691788 hasConcept C185592680 @default.
• W2036691788 hasConcept C19067145 @default.
• W2036691788 hasConcept C192562407 @default.
• W2036691788 hasConcept C22423302 @default.
• W2036691788 hasConcept C26771246 @default.
• W2036691788 hasConcept C2781463530 @default.
• W2036691788 hasConcept C2816523 @default.
• W2036691788 hasConcept C40003534 @default.
• W2036691788 hasConcept C43617362 @default.
• W2036691788 hasConcept C49040817 @default.
• W2036691788 hasConcept C50774322 @default.
• W2036691788 hasConcept C544956773 @default.
• W2036691788 hasConcept C64297162 @default.
• W2036691788 hasConcept C85080765 @default.
• W2036691788 hasConcept C86803240 @default.
• W2036691788 hasConceptScore W2036691788C113196181 @default.
• W2036691788 hasConceptScore W2036691788C120665830 @default.
• W2036691788 hasConceptScore W2036691788C121332964 @default.
• W2036691788 hasConceptScore W2036691788C145148216 @default.
• W2036691788 hasConceptScore W2036691788C151730666 @default.
• W2036691788 hasConceptScore W2036691788C159985019 @default.
• W2036691788 hasConceptScore W2036691788C160892712 @default.
• W2036691788 hasConceptScore W2036691788C169573571 @default.
• W2036691788 hasConceptScore W2036691788C171250308 @default.
• W2036691788 hasConceptScore W2036691788C178790620 @default.
• W2036691788 hasConceptScore W2036691788C185592680 @default.
• W2036691788 hasConceptScore W2036691788C19067145 @default.
• W2036691788 hasConceptScore W2036691788C192562407 @default.
• W2036691788 hasConceptScore W2036691788C22423302 @default.
• W2036691788 hasConceptScore W2036691788C26771246 @default.
• W2036691788 hasConceptScore W2036691788C2781463530 @default.

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