FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2036693710> ?p ?o ?g. }

• W2036693710 endingPage "184" @default.
• W2036693710 startingPage "177" @default.
• W2036693710 abstract "The structural, chemical, optical and mechanical properties of nanocrystalline tantalum zirconium nitride films deposited by DC unbalanced magnetron sputtering were studied by means of X-ray diffraction, atomic force microscopy, X-ray photoelectron spectroscopy, spectroscopic ellipsometry and nanoindentation. Coatings were deposited on silicon substrates with a growth temperature of 440 °C and RF bias voltages in the −40 to −130 V range. The concentration of zirconium and tantalum was regulated by controlling the power to the sputtering guns. The nitrogen concentration was controlled by varying the nitrogen flow rate and, hence, partial pressure. XRD revealed that these films formed a solid solution and that the grain size, deduced from the width of the XRD peaks using the Scherrer formula, did not vary with tantalum content. The elemental composition was determined from XPS measurements. The optical constants were measured using spectroscopic ellipsometry. A correlation between film structure/composition and optical constants was established using a Drude-Lorentz model. The mechanical properties of the coatings were evaluated using nanohardness testing and were found to depend on composition and deposition parameters. Optimum mechanical properties were achieved for a tantalum content of 10% and a substrate bias of −70 V." @default.
• W2036693710 created "2016-06-24" @default.
• W2036693710 creator A5007873451 @default.
• W2036693710 creator A5025378493 @default.
• W2036693710 creator A5087352504 @default.
• W2036693710 date "2004-10-01" @default.
• W2036693710 modified "2023-09-24" @default.
• W2036693710 title "Characterization of tantalum zirconium nitride sputter-deposited nanocrystalline coatings" @default.
• W2036693710 cites W1969166060 @default.
• W2036693710 cites W1973023008 @default.
• W2036693710 cites W1973395923 @default.
• W2036693710 cites W1974068817 @default.
• W2036693710 cites W1974823483 @default.
• W2036693710 cites W1978536063 @default.
• W2036693710 cites W1982356174 @default.
• W2036693710 cites W1994188616 @default.
• W2036693710 cites W1996770109 @default.
• W2036693710 cites W2014079300 @default.
• W2036693710 cites W2021536267 @default.
• W2036693710 cites W2023362988 @default.
• W2036693710 cites W2027536294 @default.
• W2036693710 cites W2028763954 @default.
• W2036693710 cites W2039859553 @default.
• W2036693710 cites W2045857321 @default.
• W2036693710 cites W2046475873 @default.
• W2036693710 cites W2050262043 @default.
• W2036693710 cites W2054337863 @default.
• W2036693710 cites W2060555202 @default.
• W2036693710 cites W2064066847 @default.
• W2036693710 cites W2067110049 @default.
• W2036693710 cites W2083137305 @default.
• W2036693710 cites W2089487204 @default.
• W2036693710 cites W2122969867 @default.
• W2036693710 cites W2124241288 @default.
• W2036693710 cites W2169295544 @default.
• W2036693710 cites W4234273757 @default.
• W2036693710 doi "https://doi.org/10.1016/j.surfcoat.2004.03.044" @default.
• W2036693710 hasPublicationYear "2004" @default.
• W2036693710 type Work @default.
• W2036693710 sameAs 2036693710 @default.
• W2036693710 citedByCount "29" @default.
• W2036693710 countsByYear W20366937102014 @default.
• W2036693710 countsByYear W20366937102015 @default.
• W2036693710 countsByYear W20366937102017 @default.
• W2036693710 countsByYear W20366937102018 @default.
• W2036693710 countsByYear W20366937102019 @default.
• W2036693710 countsByYear W20366937102021 @default.
• W2036693710 countsByYear W20366937102022 @default.
• W2036693710 countsByYear W20366937102023 @default.
• W2036693710 crossrefType "journal-article" @default.
• W2036693710 hasAuthorship W2036693710A5007873451 @default.
• W2036693710 hasAuthorship W2036693710A5025378493 @default.
• W2036693710 hasAuthorship W2036693710A5087352504 @default.
• W2036693710 hasConcept C113196181 @default.
• W2036693710 hasConcept C127413603 @default.
• W2036693710 hasConcept C140676511 @default.
• W2036693710 hasConcept C159985019 @default.
• W2036693710 hasConcept C171250308 @default.
• W2036693710 hasConcept C175708663 @default.
• W2036693710 hasConcept C18293161 @default.
• W2036693710 hasConcept C185592680 @default.
• W2036693710 hasConcept C19067145 @default.
• W2036693710 hasConcept C191897082 @default.
• W2036693710 hasConcept C192562407 @default.
• W2036693710 hasConcept C194760766 @default.
• W2036693710 hasConcept C22423302 @default.
• W2036693710 hasConcept C2778112282 @default.
• W2036693710 hasConcept C2778303786 @default.
• W2036693710 hasConcept C2778489163 @default.
• W2036693710 hasConcept C2779227376 @default.
• W2036693710 hasConcept C42360764 @default.
• W2036693710 hasConcept C43617362 @default.
• W2036693710 hasConcept C49326732 @default.
• W2036693710 hasConcept C514619126 @default.
• W2036693710 hasConcept C534791751 @default.
• W2036693710 hasConcept C61427134 @default.
• W2036693710 hasConceptScore W2036693710C113196181 @default.
• W2036693710 hasConceptScore W2036693710C127413603 @default.
• W2036693710 hasConceptScore W2036693710C140676511 @default.
• W2036693710 hasConceptScore W2036693710C159985019 @default.
• W2036693710 hasConceptScore W2036693710C171250308 @default.
• W2036693710 hasConceptScore W2036693710C175708663 @default.
• W2036693710 hasConceptScore W2036693710C18293161 @default.
• W2036693710 hasConceptScore W2036693710C185592680 @default.
• W2036693710 hasConceptScore W2036693710C19067145 @default.
• W2036693710 hasConceptScore W2036693710C191897082 @default.
• W2036693710 hasConceptScore W2036693710C192562407 @default.
• W2036693710 hasConceptScore W2036693710C194760766 @default.
• W2036693710 hasConceptScore W2036693710C22423302 @default.
• W2036693710 hasConceptScore W2036693710C2778112282 @default.
• W2036693710 hasConceptScore W2036693710C2778303786 @default.
• W2036693710 hasConceptScore W2036693710C2778489163 @default.
• W2036693710 hasConceptScore W2036693710C2779227376 @default.
• W2036693710 hasConceptScore W2036693710C42360764 @default.
• W2036693710 hasConceptScore W2036693710C43617362 @default.
• W2036693710 hasConceptScore W2036693710C49326732 @default.
• W2036693710 hasConceptScore W2036693710C514619126 @default.
• W2036693710 hasConceptScore W2036693710C534791751 @default.

• next