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- W2036694481 abstract "Tungsten silicide on polycrystalline Si becomes increasingly important as interconnections and gate electrodes for metal-oxide-semiconductor field-effect transistor(MOSFET) integrated circuits. Annealing behaviors of coevaporatd tungsten silicide on P-doped poly-Si are studied by x-ray diffraction, He+-backscattering, transmission electron microscopy (TEM), and secondary ion mass spectroscopy (SIMS). High-temperature annealing of silicides results in crystallization and homogenization of tungsten silicide as well as phosphorus out-diffusion from the poly-Si. Their effect on device fabrication is also discussed." @default.
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- W2036694481 date "1981-08-01" @default.
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- W2036694481 title "Properties of tungsten silicide film on polycrystalline silicon" @default.
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- W2036694481 doi "https://doi.org/10.1063/1.329393" @default.
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