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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2036705793> ?p ?o ?g. }

• W2036705793 endingPage "337" @default.
• W2036705793 startingPage "331" @default.
• W2036705793 abstract "SiC films were chemically vapor deposited onto graphite substrates using methyltrichlorosilane (MTS, CH3SiCl3) as a source and argon or hydrogen as diluent gases to investigate the effect of each diluent gas on growth behavior and characteristics. Each diluent gas used had a relative difference in deposition rate within a certain temperature region. Such growth characteristics of the SiC films as preferred orientation, microstructure, and chemical composition varied remarkably with the diluent gas used. Microhardness and surface roughness were compared for SiC films prepared using the different diluent gases." @default.
• W2036705793 created "2016-06-24" @default.
• W2036705793 creator A5003479543 @default.
• W2036705793 creator A5067660680 @default.
• W2036705793 date "2004-12-22" @default.
• W2036705793 modified "2023-10-17" @default.
• W2036705793 title "Effect of Diluent Gases on Growth Behavior and Characteristics of Chemically Vapor Deposited Silicon Carbide Films" @default.
• W2036705793 cites W15243828 @default.
• W2036705793 cites W1669089194 @default.
• W2036705793 cites W1761129223 @default.
• W2036705793 cites W1965327887 @default.
• W2036705793 cites W1966950703 @default.
• W2036705793 cites W1977434406 @default.
• W2036705793 cites W1993763866 @default.
• W2036705793 cites W1995842357 @default.
• W2036705793 cites W1996949669 @default.
• W2036705793 cites W2003863685 @default.
• W2036705793 cites W2012004006 @default.
• W2036705793 cites W2014692470 @default.
• W2036705793 cites W2023146197 @default.
• W2036705793 cites W2025763655 @default.
• W2036705793 cites W2044065417 @default.
• W2036705793 cites W2044643147 @default.
• W2036705793 cites W2047862086 @default.
• W2036705793 cites W2049430281 @default.
• W2036705793 cites W2054393026 @default.
• W2036705793 cites W2067451382 @default.
• W2036705793 cites W2073042122 @default.
• W2036705793 cites W2078382437 @default.
• W2036705793 cites W2081951543 @default.
• W2036705793 cites W2086548346 @default.
• W2036705793 cites W2095397312 @default.
• W2036705793 cites W2146418409 @default.
• W2036705793 cites W2484859902 @default.
• W2036705793 doi "https://doi.org/10.1111/j.1551-2916.1999.tb20066.x" @default.
• W2036705793 hasPublicationYear "2004" @default.
• W2036705793 type Work @default.
• W2036705793 sameAs 2036705793 @default.
• W2036705793 citedByCount "38" @default.
• W2036705793 countsByYear W20367057932012 @default.
• W2036705793 countsByYear W20367057932014 @default.
• W2036705793 countsByYear W20367057932015 @default.
• W2036705793 countsByYear W20367057932016 @default.
• W2036705793 countsByYear W20367057932017 @default.
• W2036705793 countsByYear W20367057932018 @default.
• W2036705793 countsByYear W20367057932019 @default.
• W2036705793 countsByYear W20367057932021 @default.
• W2036705793 countsByYear W20367057932022 @default.
• W2036705793 countsByYear W20367057932023 @default.
• W2036705793 crossrefType "journal-article" @default.
• W2036705793 hasAuthorship W2036705793A5003479543 @default.
• W2036705793 hasAuthorship W2036705793A5067660680 @default.
• W2036705793 hasConcept C127413603 @default.
• W2036705793 hasConcept C13965031 @default.
• W2036705793 hasConcept C159985019 @default.
• W2036705793 hasConcept C171250308 @default.
• W2036705793 hasConcept C175804951 @default.
• W2036705793 hasConcept C178790620 @default.
• W2036705793 hasConcept C185592680 @default.
• W2036705793 hasConcept C192562407 @default.
• W2036705793 hasConcept C2779698641 @default.
• W2036705793 hasConcept C2780722187 @default.
• W2036705793 hasConcept C38347018 @default.
• W2036705793 hasConcept C42360764 @default.
• W2036705793 hasConcept C512968161 @default.
• W2036705793 hasConcept C547737533 @default.
• W2036705793 hasConcept C57410435 @default.
• W2036705793 hasConcept C87976508 @default.
• W2036705793 hasConceptScore W2036705793C127413603 @default.
• W2036705793 hasConceptScore W2036705793C13965031 @default.
• W2036705793 hasConceptScore W2036705793C159985019 @default.
• W2036705793 hasConceptScore W2036705793C171250308 @default.
• W2036705793 hasConceptScore W2036705793C175804951 @default.
• W2036705793 hasConceptScore W2036705793C178790620 @default.
• W2036705793 hasConceptScore W2036705793C185592680 @default.
• W2036705793 hasConceptScore W2036705793C192562407 @default.
• W2036705793 hasConceptScore W2036705793C2779698641 @default.
• W2036705793 hasConceptScore W2036705793C2780722187 @default.
• W2036705793 hasConceptScore W2036705793C38347018 @default.
• W2036705793 hasConceptScore W2036705793C42360764 @default.
• W2036705793 hasConceptScore W2036705793C512968161 @default.
• W2036705793 hasConceptScore W2036705793C547737533 @default.
• W2036705793 hasConceptScore W2036705793C57410435 @default.
• W2036705793 hasConceptScore W2036705793C87976508 @default.
• W2036705793 hasIssue "2" @default.
• W2036705793 hasLocation W20367057931 @default.
• W2036705793 hasOpenAccess W2036705793 @default.
• W2036705793 hasPrimaryLocation W20367057931 @default.
• W2036705793 hasRelatedWork W1968969558 @default.
• W2036705793 hasRelatedWork W1976279672 @default.
• W2036705793 hasRelatedWork W1986824374 @default.
• W2036705793 hasRelatedWork W2172050029 @default.
• W2036705793 hasRelatedWork W2374923182 @default.
• W2036705793 hasRelatedWork W2557976588 @default.
• W2036705793 hasRelatedWork W2558871091 @default.
• W2036705793 hasRelatedWork W4236533478 @default.
• W2036705793 hasRelatedWork W4360619304 @default.
• W2036705793 hasRelatedWork W2948688916 @default.

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