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- W2036709217 abstract "This paper describes the design and analysis of AlN piezoelectric micro energy harvester. The harvester was designed to convert ambient vibration energy to electrical power as a AlN piezoelectric material compatible with CMOS (complementary metal oxide semiconductor) process. To cut off the leakage current, AlN was used as the insulating layer. Also, Mo was used for the excellent c-axis crystal growth as the bottom electrode. The AlN harvester which it has the low operating frequency was designed by using the ANSYS FEA (finite element analysis). From the simulation results, the resonance frequency of designed model is about 360 Hz and analyzed the bending mode, displacement and expectation output." @default.
- W2036709217 created "2016-06-24" @default.
- W2036709217 creator A5008398295 @default.
- W2036709217 creator A5028577029 @default.
- W2036709217 date "2010-05-01" @default.
- W2036709217 modified "2023-09-27" @default.
- W2036709217 title "Design and Analysis of AlN Piezoelectric Micro Energy Harvester Based on Vibration" @default.
- W2036709217 cites W2004479291 @default.
- W2036709217 cites W2018409502 @default.
- W2036709217 cites W2034480632 @default.
- W2036709217 cites W2061352219 @default.
- W2036709217 cites W2064337106 @default.
- W2036709217 cites W2084395965 @default.
- W2036709217 cites W2151603769 @default.
- W2036709217 doi "https://doi.org/10.4313/jkem.2010.23.5.424" @default.
- W2036709217 hasPublicationYear "2010" @default.
- W2036709217 type Work @default.
- W2036709217 sameAs 2036709217 @default.
- W2036709217 citedByCount "0" @default.
- W2036709217 crossrefType "journal-article" @default.
- W2036709217 hasAuthorship W2036709217A5008398295 @default.
- W2036709217 hasAuthorship W2036709217A5028577029 @default.
- W2036709217 hasBestOaLocation W20367092171 @default.
- W2036709217 hasConcept C100082104 @default.
- W2036709217 hasConcept C101518730 @default.
- W2036709217 hasConcept C107551265 @default.
- W2036709217 hasConcept C121332964 @default.
- W2036709217 hasConcept C127413603 @default.
- W2036709217 hasConcept C135628077 @default.
- W2036709217 hasConcept C147789679 @default.
- W2036709217 hasConcept C15744967 @default.
- W2036709217 hasConcept C159985019 @default.
- W2036709217 hasConcept C163258240 @default.
- W2036709217 hasConcept C17525397 @default.
- W2036709217 hasConcept C185592680 @default.
- W2036709217 hasConcept C192562407 @default.
- W2036709217 hasConcept C198394728 @default.
- W2036709217 hasConcept C24890656 @default.
- W2036709217 hasConcept C49040817 @default.
- W2036709217 hasConcept C542102704 @default.
- W2036709217 hasConcept C62520636 @default.
- W2036709217 hasConcept C66938386 @default.
- W2036709217 hasConcept C87210426 @default.
- W2036709217 hasConceptScore W2036709217C100082104 @default.
- W2036709217 hasConceptScore W2036709217C101518730 @default.
- W2036709217 hasConceptScore W2036709217C107551265 @default.
- W2036709217 hasConceptScore W2036709217C121332964 @default.
- W2036709217 hasConceptScore W2036709217C127413603 @default.
- W2036709217 hasConceptScore W2036709217C135628077 @default.
- W2036709217 hasConceptScore W2036709217C147789679 @default.
- W2036709217 hasConceptScore W2036709217C15744967 @default.
- W2036709217 hasConceptScore W2036709217C159985019 @default.
- W2036709217 hasConceptScore W2036709217C163258240 @default.
- W2036709217 hasConceptScore W2036709217C17525397 @default.
- W2036709217 hasConceptScore W2036709217C185592680 @default.
- W2036709217 hasConceptScore W2036709217C192562407 @default.
- W2036709217 hasConceptScore W2036709217C198394728 @default.
- W2036709217 hasConceptScore W2036709217C24890656 @default.
- W2036709217 hasConceptScore W2036709217C49040817 @default.
- W2036709217 hasConceptScore W2036709217C542102704 @default.
- W2036709217 hasConceptScore W2036709217C62520636 @default.
- W2036709217 hasConceptScore W2036709217C66938386 @default.
- W2036709217 hasConceptScore W2036709217C87210426 @default.
- W2036709217 hasLocation W20367092171 @default.
- W2036709217 hasOpenAccess W2036709217 @default.
- W2036709217 hasPrimaryLocation W20367092171 @default.
- W2036709217 hasRelatedWork W1954823331 @default.
- W2036709217 hasRelatedWork W2019295282 @default.
- W2036709217 hasRelatedWork W2031418021 @default.
- W2036709217 hasRelatedWork W2053800619 @default.
- W2036709217 hasRelatedWork W2105501723 @default.
- W2036709217 hasRelatedWork W2523287168 @default.
- W2036709217 hasRelatedWork W2587140989 @default.
- W2036709217 hasRelatedWork W2597092141 @default.
- W2036709217 hasRelatedWork W2841062098 @default.
- W2036709217 hasRelatedWork W2899853565 @default.
- W2036709217 hasRelatedWork W2902195717 @default.
- W2036709217 hasRelatedWork W2907170313 @default.
- W2036709217 hasRelatedWork W2952369546 @default.
- W2036709217 hasRelatedWork W2962712552 @default.
- W2036709217 hasRelatedWork W2965543830 @default.
- W2036709217 hasRelatedWork W3005690203 @default.
- W2036709217 hasRelatedWork W3036962777 @default.
- W2036709217 hasRelatedWork W3097076372 @default.
- W2036709217 hasRelatedWork W3097474111 @default.
- W2036709217 hasRelatedWork W3141827231 @default.
- W2036709217 isParatext "false" @default.
- W2036709217 isRetracted "false" @default.
- W2036709217 magId "2036709217" @default.
- W2036709217 workType "article" @default.