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• W2036722170 endingPage "17022" @default.
• W2036722170 startingPage "17007" @default.
• W2036722170 abstract "Increasing the temperature variation rate is a useful method for enhancing the response of pyroelectric devices. A three-dimensional ZnO film was fabricated by the aerosol deposition (AD) rapid process using the shadow mask method, which induces lateral temperature gradients on the sidewalls of the responsive element, thereby increasing the temperature variation rate. To enhance the quality of the film and reduce the concentration of defects, the film was further treated by laser annealing, and the integration of a comb-like top electrode enhanced the voltage response and reduced the response time of the resulting ZnO pyroelectric devices." @default.
• W2036722170 created "2016-06-24" @default.
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• W2036722170 date "2012-12-12" @default.
• W2036722170 modified "2023-10-03" @default.
• W2036722170 title "Improved Response of ZnO Films for Pyroelectric Devices" @default.
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• W2036722170 doi "https://doi.org/10.3390/s121217007" @default.
• W2036722170 hasPubMedCentralId "https://www.ncbi.nlm.nih.gov/pmc/articles/3571823" @default.
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