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- W2036747146 abstract "X-ray lithography experiments using laser plasma X-ray are presented. The parameters range of the target and laser conditions which allow to achieve an adequate industrial throughput for X-ray lithography are studied." @default.
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- W2036747146 date "1987-12-01" @default.
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- W2036747146 title "X-ray lithography with laser-plasma sources" @default.
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- W2036747146 doi "https://doi.org/10.1016/0167-9317(87)90050-5" @default.
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