Matches in SemOpenAlex for { <https://semopenalex.org/work/W2036755890> ?p ?o ?g. }
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- W2036755890 endingPage "1294" @default.
- W2036755890 startingPage "1289" @default.
- W2036755890 abstract "A special speckle microinterferometer has been developed to test the mechanical properties of thin films electroplated on the single crystal silicon wafer. A piezo-actuated micro-loading unit is synchronized with the microinterfermeter to measure thin film deflection in bending with an accuracy of sub-micrometers. All of the film specimens were microfabricated to be the type of microbridge samples. They are made of Cu and NiFe, the sizes from 1102.9µm to 213.7µm long, 491.0µm to 9.7µm wide. The corresponding thicknesses are 9.4µm and 7.6µm, respectively. Deflections of the microbradge samples can be measured full-field and real-time by using the microinterferometer and no patterning or marking of the specimen surface is needed. The loading force is directly measured using a miniature load cell. The Young’s moduli are calculated for both material and sample size from the load-deflection curves. Test techniques, procedures and factors which affect on the deflection measurements are briefly presented along with detailed analyzes of the results." @default.
- W2036755890 created "2016-06-24" @default.
- W2036755890 creator A5073096655 @default.
- W2036755890 creator A5082491171 @default.
- W2036755890 date "2006-03-01" @default.
- W2036755890 modified "2023-10-16" @default.
- W2036755890 title "Real-Time and Full-Field Deflection Measurement of Thin Films Electroplated on the Single Crystal Silicon Wafers" @default.
- W2036755890 cites W1964800497 @default.
- W2036755890 cites W1977104848 @default.
- W2036755890 cites W1993148787 @default.
- W2036755890 cites W2006131502 @default.
- W2036755890 cites W2006953631 @default.
- W2036755890 cites W2025328550 @default.
- W2036755890 cites W2046008264 @default.
- W2036755890 cites W2051566706 @default.
- W2036755890 cites W2069945945 @default.
- W2036755890 cites W2070294760 @default.
- W2036755890 cites W2073162442 @default.
- W2036755890 cites W2085169395 @default.
- W2036755890 cites W2087728647 @default.
- W2036755890 cites W2090883726 @default.
- W2036755890 cites W2109000180 @default.
- W2036755890 cites W2111062180 @default.
- W2036755890 cites W2115302362 @default.
- W2036755890 cites W4241153771 @default.
- W2036755890 doi "https://doi.org/10.4028/www.scientific.net/kem.306-308.1289" @default.
- W2036755890 hasPublicationYear "2006" @default.
- W2036755890 type Work @default.
- W2036755890 sameAs 2036755890 @default.
- W2036755890 citedByCount "1" @default.
- W2036755890 countsByYear W20367558902022 @default.
- W2036755890 crossrefType "journal-article" @default.
- W2036755890 hasAuthorship W2036755890A5073096655 @default.
- W2036755890 hasAuthorship W2036755890A5082491171 @default.
- W2036755890 hasConcept C120665830 @default.
- W2036755890 hasConcept C121332964 @default.
- W2036755890 hasConcept C159985019 @default.
- W2036755890 hasConcept C160671074 @default.
- W2036755890 hasConcept C171250308 @default.
- W2036755890 hasConcept C185592680 @default.
- W2036755890 hasConcept C19067145 @default.
- W2036755890 hasConcept C192562407 @default.
- W2036755890 hasConcept C2779227376 @default.
- W2036755890 hasConcept C2781355719 @default.
- W2036755890 hasConcept C49040817 @default.
- W2036755890 hasConcept C51807945 @default.
- W2036755890 hasConcept C544956773 @default.
- W2036755890 hasConcept C73922627 @default.
- W2036755890 hasConcept C8010536 @default.
- W2036755890 hasConceptScore W2036755890C120665830 @default.
- W2036755890 hasConceptScore W2036755890C121332964 @default.
- W2036755890 hasConceptScore W2036755890C159985019 @default.
- W2036755890 hasConceptScore W2036755890C160671074 @default.
- W2036755890 hasConceptScore W2036755890C171250308 @default.
- W2036755890 hasConceptScore W2036755890C185592680 @default.
- W2036755890 hasConceptScore W2036755890C19067145 @default.
- W2036755890 hasConceptScore W2036755890C192562407 @default.
- W2036755890 hasConceptScore W2036755890C2779227376 @default.
- W2036755890 hasConceptScore W2036755890C2781355719 @default.
- W2036755890 hasConceptScore W2036755890C49040817 @default.
- W2036755890 hasConceptScore W2036755890C51807945 @default.
- W2036755890 hasConceptScore W2036755890C544956773 @default.
- W2036755890 hasConceptScore W2036755890C73922627 @default.
- W2036755890 hasConceptScore W2036755890C8010536 @default.
- W2036755890 hasLocation W20367558901 @default.
- W2036755890 hasOpenAccess W2036755890 @default.
- W2036755890 hasPrimaryLocation W20367558901 @default.
- W2036755890 hasRelatedWork W2026213874 @default.
- W2036755890 hasRelatedWork W2036755890 @default.
- W2036755890 hasRelatedWork W2082293200 @default.
- W2036755890 hasRelatedWork W2137307547 @default.
- W2036755890 hasRelatedWork W2374452796 @default.
- W2036755890 hasRelatedWork W2380293314 @default.
- W2036755890 hasRelatedWork W3082440218 @default.
- W2036755890 hasRelatedWork W329858604 @default.
- W2036755890 hasRelatedWork W4232900523 @default.
- W2036755890 hasRelatedWork W4285802202 @default.
- W2036755890 hasVolume "306-308" @default.
- W2036755890 isParatext "false" @default.
- W2036755890 isRetracted "false" @default.
- W2036755890 magId "2036755890" @default.
- W2036755890 workType "article" @default.