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- W2036803734 abstract "A liquid metal ion source using a Cu–P–Pt–B alloy has been developed to emit both boron and phosphorus ions for maskless ion implantation. The relative flux intensities of B + and P 2+ to total ion flux are 13 and 15%, respectively, at total ion current, I T , of 30 µA. These ions are separable by mass separator with a low mass-resolving power of m /Δ m ≃10. A source lifetime of more than 30 hours has been achieved at I T =10∼50 µA." @default.
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- W2036803734 date "1986-11-01" @default.
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- W2036803734 title "Boron and Phosphorus Jon Emissions from a Cu-P-Pt-B Liquid Metal Ion Source" @default.
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- W2036803734 doi "https://doi.org/10.1143/jjap.25.l885" @default.
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