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- W2036827945 abstract "The temporal variation of the energy of positive ions deposited in metal electrodes inserted in a plasma to which a negative voltage step is applied is computed. Effects of impurity positive or negative ions upon the plasma source ion implantation process are calculated." @default.
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- W2036827945 title "Energy of positive ions absorbed by negatively pulsed electrodes in two and three component plasmas" @default.
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- W2036827945 doi "https://doi.org/10.1063/1.358605" @default.
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