Matches in SemOpenAlex for { <https://semopenalex.org/work/W2036956670> ?p ?o ?g. }
Showing items 1 to 94 of
94
with 100 items per page.
- W2036956670 endingPage "89" @default.
- W2036956670 startingPage "83" @default.
- W2036956670 abstract "Abstract Tense thin-film polycrystalline (poly-) Si torsion bars are advantageous in behaving as compliant springs against the twisting motion of electrostatically low-voltage-driven micromirrors. In this study, the nonlinear spring effect of the tense thin-film poly-Si torsion bar of a micromirror was characterised. The nonlinear spring effect of this torsion bar was explained theoretically, considering the bending and stretching effects in addition to the shear stress effect. The tensile stress induced in the thin-film poly-Si torsion bar is 300–400 MPa, and the bar maintains its compliance during the rotation of the mirror and increases its stiffness to suppress the pull-in instability. The torsion bar exhibits a large hard-spring effect with the bending of the film, observed as an increase of the ringing frequency. The spring constant was experimentally observed to increase by 6.25 times. The theoretical results agree well with the experimental results regarding the magnitude of the nonlinear spring constant." @default.
- W2036956670 created "2016-06-24" @default.
- W2036956670 creator A5002031696 @default.
- W2036956670 creator A5005900648 @default.
- W2036956670 creator A5018457432 @default.
- W2036956670 creator A5049780574 @default.
- W2036956670 creator A5060148821 @default.
- W2036956670 creator A5060173388 @default.
- W2036956670 date "2013-06-01" @default.
- W2036956670 modified "2023-10-17" @default.
- W2036956670 title "Nonlinear spring effect of tense thin-film torsion bar combined with electrostatic driving" @default.
- W2036956670 cites W144631110 @default.
- W2036956670 cites W1969082744 @default.
- W2036956670 cites W1982040012 @default.
- W2036956670 cites W2002478302 @default.
- W2036956670 cites W2017262538 @default.
- W2036956670 cites W2029048057 @default.
- W2036956670 cites W2038554669 @default.
- W2036956670 cites W2057159353 @default.
- W2036956670 cites W2060165768 @default.
- W2036956670 cites W2099171915 @default.
- W2036956670 cites W2100725972 @default.
- W2036956670 cites W2124770290 @default.
- W2036956670 cites W2131311236 @default.
- W2036956670 cites W2133283140 @default.
- W2036956670 cites W2137437969 @default.
- W2036956670 cites W2141462756 @default.
- W2036956670 cites W2144557698 @default.
- W2036956670 cites W2151437947 @default.
- W2036956670 cites W2162869577 @default.
- W2036956670 cites W2171762656 @default.
- W2036956670 doi "https://doi.org/10.1016/j.sna.2013.03.009" @default.
- W2036956670 hasPublicationYear "2013" @default.
- W2036956670 type Work @default.
- W2036956670 sameAs 2036956670 @default.
- W2036956670 citedByCount "9" @default.
- W2036956670 countsByYear W20369566702013 @default.
- W2036956670 countsByYear W20369566702014 @default.
- W2036956670 countsByYear W20369566702016 @default.
- W2036956670 countsByYear W20369566702017 @default.
- W2036956670 countsByYear W20369566702018 @default.
- W2036956670 countsByYear W20369566702019 @default.
- W2036956670 countsByYear W20369566702020 @default.
- W2036956670 crossrefType "journal-article" @default.
- W2036956670 hasAuthorship W2036956670A5002031696 @default.
- W2036956670 hasAuthorship W2036956670A5005900648 @default.
- W2036956670 hasAuthorship W2036956670A5018457432 @default.
- W2036956670 hasAuthorship W2036956670A5049780574 @default.
- W2036956670 hasAuthorship W2036956670A5060148821 @default.
- W2036956670 hasAuthorship W2036956670A5060173388 @default.
- W2036956670 hasConcept C121332964 @default.
- W2036956670 hasConcept C127413603 @default.
- W2036956670 hasConcept C141071460 @default.
- W2036956670 hasConcept C158622935 @default.
- W2036956670 hasConcept C159985019 @default.
- W2036956670 hasConcept C192562407 @default.
- W2036956670 hasConcept C2778712887 @default.
- W2036956670 hasConcept C57614664 @default.
- W2036956670 hasConcept C62520636 @default.
- W2036956670 hasConcept C66938386 @default.
- W2036956670 hasConcept C71924100 @default.
- W2036956670 hasConcept C77461463 @default.
- W2036956670 hasConceptScore W2036956670C121332964 @default.
- W2036956670 hasConceptScore W2036956670C127413603 @default.
- W2036956670 hasConceptScore W2036956670C141071460 @default.
- W2036956670 hasConceptScore W2036956670C158622935 @default.
- W2036956670 hasConceptScore W2036956670C159985019 @default.
- W2036956670 hasConceptScore W2036956670C192562407 @default.
- W2036956670 hasConceptScore W2036956670C2778712887 @default.
- W2036956670 hasConceptScore W2036956670C57614664 @default.
- W2036956670 hasConceptScore W2036956670C62520636 @default.
- W2036956670 hasConceptScore W2036956670C66938386 @default.
- W2036956670 hasConceptScore W2036956670C71924100 @default.
- W2036956670 hasConceptScore W2036956670C77461463 @default.
- W2036956670 hasLocation W20369566701 @default.
- W2036956670 hasOpenAccess W2036956670 @default.
- W2036956670 hasPrimaryLocation W20369566701 @default.
- W2036956670 hasRelatedWork W2305591925 @default.
- W2036956670 hasRelatedWork W2370174816 @default.
- W2036956670 hasRelatedWork W2375920191 @default.
- W2036956670 hasRelatedWork W2380293314 @default.
- W2036956670 hasRelatedWork W2393488216 @default.
- W2036956670 hasRelatedWork W2802066671 @default.
- W2036956670 hasRelatedWork W2943188944 @default.
- W2036956670 hasRelatedWork W2951238711 @default.
- W2036956670 hasRelatedWork W3082440218 @default.
- W2036956670 hasRelatedWork W4230502228 @default.
- W2036956670 hasVolume "195" @default.
- W2036956670 isParatext "false" @default.
- W2036956670 isRetracted "false" @default.
- W2036956670 magId "2036956670" @default.
- W2036956670 workType "article" @default.