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- W2036986840 abstract "Abstract The x-ray (λ = 0.8,1.4nm) and deep UV (λ = 248nm) responses of copolymers of TBS and SO 2 are described. Resist sensitivity is shown to improve by addition of an arylmethyl sulfone acid generating species to the formulation, partial deprotection of the copolymer during prebake and optimization of the post-exposure bake (PEB) conditions. The results are used to identify single component chemically-amplified x-ray and deep UV sensitive resists." @default.
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- W2036986840 date "1992-03-01" @default.
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- W2036986840 title "Lithographic properties of chemically amplified resists based on copolymers of 4-tert-butoxycarbonyloxystyrene (TBS) and sulfur dioxide (SO2)" @default.
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- W2036986840 doi "https://doi.org/10.1016/0167-9317(92)90051-r" @default.
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