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- W2037003345 abstract "A lithographic technique using a Scanning Transmission Electron Microscope is being developed. This technique is capable of drawing accurate patterns, with line widths much less than 50 nm, over small areas. The method is described and its application to the manufacture of diffractive optical components for soft X-rays is discussed." @default.
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- W2037003345 date "1984-02-01" @default.
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- W2037003345 title "A NEW LITHOGRAPHIC TECHNIQUE FOR THE MANUFACTURE OF HIGH RESOLUTION ZONE PLATES FOR SOFT X-RAYS" @default.
- W2037003345 doi "https://doi.org/10.1051/jphyscol:1984222" @default.
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