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• W2037024260 abstract "Depth profile analysis by glow discharge optical emission spectroscopy (GDOS) is discussed from the point of view of quantification, i.e. evaluation of actual concentration vs depth distributions from the as-measured signal vs time functions. A method of quantification for the case of ideally depth-resolved sampling is proposed, based on the concentration and sputtering rate calibration. Various disturbing effects causing profile distortion are discussed and for the most serious one, for the crater effect, a phenomenological description is given. In this approach, it is assumed that sample sputtering takes place with different sputtering rates at different parts of the erosion crater and a weight function is introduced, which describes sputtering rate distribution for a given matrix and for given operating conditions of the glow discharge source. Observed signal response for various thin film systems and observed erosion crater shapes are in accordance with this theory. Finally, quantification of the depth profiles of copper-nickel and copper-silver diffusion couples is presented, demonstrating the ability of the GDOS method to provide useful information on actual concentration vs depth distributions, if suitable operating conditions are used." @default.
• W2037024260 created "2016-06-24" @default.
• W2037024260 creator A5058828880 @default.
• W2037024260 date "1992-07-01" @default.
• W2037024260 modified "2023-10-17" @default.
• W2037024260 title "Quantitative evaluation of depth profiles analysed by glow discharge optical emission spectroscopy: analysis of diffusion processes" @default.
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• W2037024260 doi "https://doi.org/10.1016/0584-8547(92)80081-q" @default.
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