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- W2037059933 abstract "We suggested and demonstrated a novel method that can determine the thickness and refractive index of a wafer at the same time in a single measurement by using the optical comb. The thickness and refractive index of a wafer can be separated simply from optical thickness by using the various phase information obtained in spectral domain. For the feasibility test, the thickness and refractive index of a double side polished wafer were measured." @default.
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- W2037059933 date "2010-01-01" @default.
- W2037059933 modified "2023-09-26" @default.
- W2037059933 title "Thickness and refractive index measurement of a wafer based on the optical comb" @default.
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- W2037059933 doi "https://doi.org/10.1364/cleo.2010.jwa46" @default.
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