FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2037074111> ?p ?o ?g. }

• W2037074111 endingPage "626" @default.
• W2037074111 startingPage "623" @default.
• W2037074111 abstract "In ultrahigh vacuum systems quadrupole mass spectrometers are most widely used for the determination of the residual gas composition as well as for process control, e.g. at higher pressure. Quadrupoles here have several advantages over other types of mass spectrometers such as ease of installation and operation, small size, high dynamic range, fast measuring speed and no magnetic fields. For residual gas measurements in the extreme UHV specially adapted quadrupoles must be used. They have to show adequately low outgassing rates for keeping the original gas composition undisturbed. This is obtained by the choice of special materials and by a high temperature treatment of all components. In addition, very low detection limits are needed. This requires a special detector design for the suppression of possible background signals. An overview on the detection capabilities, background effects, possible artifacts, operation software as well as multiplexing opportunities will be given. Another application for quadrupoles in uhv systems is process control. Examples here are (a) parallel determination and on-line closed loop control of the evaporation rates of several sources during, e.g. molecular beam epitaxy (MBE) processes utilizing the fast measuring speed ; and (b) process gas monitoring during, e.g. sputter processes utilizing the high dynamic range." @default.
• W2037074111 created "2016-06-24" @default.
• W2037074111 creator A5090443322 @default.
• W2037074111 date "1993-05-01" @default.
• W2037074111 modified "2023-09-25" @default.
• W2037074111 title "Use of quadrupole mass spectrometers in ultrahigh vacuum systems" @default.
• W2037074111 cites W1992918486 @default.
• W2037074111 cites W1994064397 @default.
• W2037074111 cites W2042165363 @default.
• W2037074111 cites W2042764560 @default.
• W2037074111 cites W2043380513 @default.
• W2037074111 cites W2055871571 @default.
• W2037074111 cites W2061712138 @default.
• W2037074111 cites W2071519119 @default.
• W2037074111 cites W2077896243 @default.
• W2037074111 cites W2079721350 @default.
• W2037074111 cites W2081318436 @default.
• W2037074111 cites W2328755748 @default.
• W2037074111 cites W2615250546 @default.
• W2037074111 doi "https://doi.org/10.1016/0042-207x(93)90111-m" @default.
• W2037074111 hasPublicationYear "1993" @default.
• W2037074111 type Work @default.
• W2037074111 sameAs 2037074111 @default.
• W2037074111 citedByCount "8" @default.
• W2037074111 countsByYear W20370741112012 @default.
• W2037074111 countsByYear W20370741112016 @default.
• W2037074111 countsByYear W20370741112017 @default.
• W2037074111 countsByYear W20370741112018 @default.
• W2037074111 crossrefType "journal-article" @default.
• W2037074111 hasAuthorship W2037074111A5090443322 @default.
• W2037074111 hasConcept C1012414 @default.
• W2037074111 hasConcept C103232671 @default.
• W2037074111 hasConcept C111919701 @default.
• W2037074111 hasConcept C113196181 @default.
• W2037074111 hasConcept C11413529 @default.
• W2037074111 hasConcept C116915560 @default.
• W2037074111 hasConcept C120665830 @default.
• W2037074111 hasConcept C121332964 @default.
• W2037074111 hasConcept C127413603 @default.
• W2037074111 hasConcept C1276947 @default.
• W2037074111 hasConcept C155512373 @default.
• W2037074111 hasConcept C162356407 @default.
• W2037074111 hasConcept C171250308 @default.
• W2037074111 hasConcept C175721412 @default.
• W2037074111 hasConcept C184779094 @default.
• W2037074111 hasConcept C185592680 @default.
• W2037074111 hasConcept C19067145 @default.
• W2037074111 hasConcept C192562407 @default.
• W2037074111 hasConcept C22423302 @default.
• W2037074111 hasConcept C33390570 @default.
• W2037074111 hasConcept C39984356 @default.
• W2037074111 hasConcept C41008148 @default.
• W2037074111 hasConcept C43617362 @default.
• W2037074111 hasConcept C57540601 @default.
• W2037074111 hasConcept C62520636 @default.
• W2037074111 hasConcept C82225425 @default.
• W2037074111 hasConcept C87133666 @default.
• W2037074111 hasConcept C94915269 @default.
• W2037074111 hasConcept C97355855 @default.
• W2037074111 hasConcept C98045186 @default.
• W2037074111 hasConceptScore W2037074111C1012414 @default.
• W2037074111 hasConceptScore W2037074111C103232671 @default.
• W2037074111 hasConceptScore W2037074111C111919701 @default.
• W2037074111 hasConceptScore W2037074111C113196181 @default.
• W2037074111 hasConceptScore W2037074111C11413529 @default.
• W2037074111 hasConceptScore W2037074111C116915560 @default.
• W2037074111 hasConceptScore W2037074111C120665830 @default.
• W2037074111 hasConceptScore W2037074111C121332964 @default.
• W2037074111 hasConceptScore W2037074111C127413603 @default.
• W2037074111 hasConceptScore W2037074111C1276947 @default.
• W2037074111 hasConceptScore W2037074111C155512373 @default.
• W2037074111 hasConceptScore W2037074111C162356407 @default.
• W2037074111 hasConceptScore W2037074111C171250308 @default.
• W2037074111 hasConceptScore W2037074111C175721412 @default.
• W2037074111 hasConceptScore W2037074111C184779094 @default.
• W2037074111 hasConceptScore W2037074111C185592680 @default.
• W2037074111 hasConceptScore W2037074111C19067145 @default.
• W2037074111 hasConceptScore W2037074111C192562407 @default.
• W2037074111 hasConceptScore W2037074111C22423302 @default.
• W2037074111 hasConceptScore W2037074111C33390570 @default.
• W2037074111 hasConceptScore W2037074111C39984356 @default.
• W2037074111 hasConceptScore W2037074111C41008148 @default.
• W2037074111 hasConceptScore W2037074111C43617362 @default.
• W2037074111 hasConceptScore W2037074111C57540601 @default.
• W2037074111 hasConceptScore W2037074111C62520636 @default.
• W2037074111 hasConceptScore W2037074111C82225425 @default.
• W2037074111 hasConceptScore W2037074111C87133666 @default.
• W2037074111 hasConceptScore W2037074111C94915269 @default.
• W2037074111 hasConceptScore W2037074111C97355855 @default.
• W2037074111 hasConceptScore W2037074111C98045186 @default.
• W2037074111 hasIssue "5-7" @default.
• W2037074111 hasLocation W20370741111 @default.
• W2037074111 hasOpenAccess W2037074111 @default.
• W2037074111 hasPrimaryLocation W20370741111 @default.
• W2037074111 hasRelatedWork W1537459479 @default.
• W2037074111 hasRelatedWork W1974617118 @default.
• W2037074111 hasRelatedWork W1993438827 @default.
• W2037074111 hasRelatedWork W2037074111 @default.

• next