Matches in SemOpenAlex for { <https://semopenalex.org/work/W2037091749> ?p ?o ?g. }
Showing items 1 to 70 of
70
with 100 items per page.
- W2037091749 endingPage "54" @default.
- W2037091749 startingPage "50" @default.
- W2037091749 abstract "Abstract On Cameca magnetic sector SIMS (Secondary Ion Mass Spectrometer) instruments, detection of negative secondary ions during analysis of insulating materials represents one of the more challenging uses of the instrument. This is because the highest sensitivity is achieved using a positive Cesium primary ion beam to sputter a sample held at a negative potential. The combination of positive charge from the primary beam and the acceleration of negative ions from the sample surface results in the build-up of positive charge in the sputtered area. The Normal-incidence Electron Gun (NEG) is used to deliver electrons to neutralize the positive charge build-up. At typical conditions, the electron beam diameter is rather small (∼150 μm), so it is critical to align the NEG to overlay the analysis area as closely as possible. A new method has been developed to utilize cathodoluminescence of gallium nitride (GaN) to visually align the electron gun. This approach is shown to result in reproducible analyses of insulating phases, including depth profiling of oxide on semiconductor materials, bulk analyses for hydrogen, and oxygen isotope ratio microanalyses." @default.
- W2037091749 created "2016-06-24" @default.
- W2037091749 creator A5007401216 @default.
- W2037091749 creator A5026533428 @default.
- W2037091749 creator A5036547458 @default.
- W2037091749 date "2013-01-01" @default.
- W2037091749 modified "2023-09-30" @default.
- W2037091749 title "Normal-incidence Electron Gun alignment method for negative ion analysis on insulators by magnetic sector SIMS" @default.
- W2037091749 cites W1606315503 @default.
- W2037091749 cites W2009615835 @default.
- W2037091749 cites W2016367754 @default.
- W2037091749 cites W2076116914 @default.
- W2037091749 cites W2082273587 @default.
- W2037091749 cites W2090206995 @default.
- W2037091749 cites W2109196725 @default.
- W2037091749 cites W2134045805 @default.
- W2037091749 cites W2160410763 @default.
- W2037091749 doi "https://doi.org/10.1016/j.nimb.2012.11.001" @default.
- W2037091749 hasPublicationYear "2013" @default.
- W2037091749 type Work @default.
- W2037091749 sameAs 2037091749 @default.
- W2037091749 citedByCount "8" @default.
- W2037091749 countsByYear W20370917492014 @default.
- W2037091749 countsByYear W20370917492016 @default.
- W2037091749 countsByYear W20370917492019 @default.
- W2037091749 countsByYear W20370917492020 @default.
- W2037091749 crossrefType "journal-article" @default.
- W2037091749 hasAuthorship W2037091749A5007401216 @default.
- W2037091749 hasAuthorship W2037091749A5026533428 @default.
- W2037091749 hasAuthorship W2037091749A5036547458 @default.
- W2037091749 hasConcept C120665830 @default.
- W2037091749 hasConcept C121332964 @default.
- W2037091749 hasConcept C145148216 @default.
- W2037091749 hasConcept C147120987 @default.
- W2037091749 hasConcept C179156687 @default.
- W2037091749 hasConcept C185544564 @default.
- W2037091749 hasConcept C192562407 @default.
- W2037091749 hasConcept C61511704 @default.
- W2037091749 hasConcept C62520636 @default.
- W2037091749 hasConcept C95312477 @default.
- W2037091749 hasConceptScore W2037091749C120665830 @default.
- W2037091749 hasConceptScore W2037091749C121332964 @default.
- W2037091749 hasConceptScore W2037091749C145148216 @default.
- W2037091749 hasConceptScore W2037091749C147120987 @default.
- W2037091749 hasConceptScore W2037091749C179156687 @default.
- W2037091749 hasConceptScore W2037091749C185544564 @default.
- W2037091749 hasConceptScore W2037091749C192562407 @default.
- W2037091749 hasConceptScore W2037091749C61511704 @default.
- W2037091749 hasConceptScore W2037091749C62520636 @default.
- W2037091749 hasConceptScore W2037091749C95312477 @default.
- W2037091749 hasLocation W20370917491 @default.
- W2037091749 hasOpenAccess W2037091749 @default.
- W2037091749 hasPrimaryLocation W20370917491 @default.
- W2037091749 hasRelatedWork W1973660662 @default.
- W2037091749 hasRelatedWork W1978988423 @default.
- W2037091749 hasRelatedWork W2000202577 @default.
- W2037091749 hasRelatedWork W2032893505 @default.
- W2037091749 hasRelatedWork W2037179530 @default.
- W2037091749 hasRelatedWork W2048015767 @default.
- W2037091749 hasRelatedWork W2055665452 @default.
- W2037091749 hasRelatedWork W2068445713 @default.
- W2037091749 hasRelatedWork W2073551896 @default.
- W2037091749 hasRelatedWork W2591501297 @default.
- W2037091749 hasVolume "295" @default.
- W2037091749 isParatext "false" @default.
- W2037091749 isRetracted "false" @default.
- W2037091749 magId "2037091749" @default.
- W2037091749 workType "article" @default.