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• W2037099281 startingPage "035011" @default.
• W2037099281 abstract "This paper presents a method for driving a MEMS electrostatic actuator, while simultaneously sensing the resulting displacement/capacitance without the use of an additional physical sensing structure. The approach superposes the sensing and actuation signals into a single input into the system and obtains its mechanical (displacement) response from the modulation (amplitude or phase) it produces on the sensing input. The approach is analyzed and experimentally shown to produce an amplitude modulation of 0.1857 mV µm−1 of displacement on electrostatic drive that produces a displacement of 14 µm at 100 V and a 0.55 pF capacitance change from a nominal capacitance of 0.35 Pico farads. The approach enables a very cost-effective and convenient approach to detect the displacement of MEMS devices for a variety of applications in the laboratory environment, and provide a potential feedback signal for closed-loop control of electrostatically driven MEMS devices." @default.
• W2037099281 created "2016-06-24" @default.
• W2037099281 creator A5004826420 @default.
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• W2037099281 date "2008-01-24" @default.
• W2037099281 modified "2023-09-27" @default.
• W2037099281 title "Simultaneous actuation and displacement sensing for electrostatic drives" @default.
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• W2037099281 doi "https://doi.org/10.1088/0960-1317/18/3/035011" @default.
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