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• W2037129179 abstract "A high-resolution x-ray diffractometer and transmission electron microscope (TEM) are used to characterize the redistribution of As precipitates in Si δ-doped GaAs grown by molecular-beam epitaxy at low substrate temperature (230 °C). The analysis results indicate that superlattice satellite peaks, as observed for samples annealed at 700–900 °C for 10 min, are attributed to the formation of the GaAs/As superlattice. Also, the intensity of satellite peaks in x-ray rocking curves and TEM observations reveals the varying degree of As precipitates confined on the Si δ-doped planes. Furthermore, the asymmetry of the satellite peaks clearly indicates the lattice expansion and contraction of the annealed low-temperature epitaxial layers." @default.
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• W2037129179 date "1994-11-15" @default.
• W2037129179 modified "2023-10-18" @default.
• W2037129179 title "As precipitate redistribution in Si δ‐doped low‐temperature GaAs" @default.
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• W2037129179 doi "https://doi.org/10.1063/1.357076" @default.
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