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- W2037276686 abstract "A new mask set for n-MOSFET test devices and circuits is made to investigate the feasibility of electron beam mask fabrication with very small linewidths. The mask set is basically designed with a 1.5 µm design rule, but contained finer lines to clarify problem areas. A negative electron resist PGMA and a positive electron resist P(MMA-AN) are used. Linewidth control is better than ±0.1 µm with PGMA and ±0.2 µm with P(MMA-AN). Pattern placement accuracy is ±0.15 µm and overlay accuracy is ±0.25 µm. The characteristics of MOSFET's and RAM's fabricated using the 1.5 µm design rule masks, are measured." @default.
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- W2037276686 date "1980-01-01" @default.
- W2037276686 modified "2023-09-26" @default.
- W2037276686 title "Electron Beam Mask Fabrication for MOSLSI's with 1.5 µm Design Rule" @default.
- W2037276686 doi "https://doi.org/10.7567/jjaps.19s1.51" @default.
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