Matches in SemOpenAlex for { <https://semopenalex.org/work/W2037461305> ?p ?o ?g. }
- W2037461305 endingPage "214504" @default.
- W2037461305 startingPage "214504" @default.
- W2037461305 abstract "The efficacy of higher-temperature gettering processes in reducing precipitated iron concentrations is assessed by synchrotron-based micro-X-ray fluorescence. By measuring the same grain boundary before and after phosphorus diffusion in a set of wafers from adjacent ingot heights, the reduction in size of individual precipitates is measured as a function of gettering temperature in samples from the top of an ingot intentionally contaminated with iron in the melt. Compared to a baseline 820 °C phosphorus diffusion, 870 °C and 920 °C diffusions result in a larger reduction in iron-silicide precipitate size. Minority carrier lifetimes measured on wafers from the same ingot heights processed with the same treatments show that the greater reduction in precipitated metals is associated with a strong increase in lifetime. In a sample contaminated with both copper and iron in the melt, significant iron gettering and complete dissolution of detectable copper precipitates is observed despite the higher total metal concentration. Finally, a homogenization pre-anneal in N2 at 920 °C followed by an 820 °C phosphorus diffusion produces precipitate size reductions and lifetimes similar to an 870 °C phosphorus diffusion without lowering the emitter sheet resistance." @default.
- W2037461305 created "2016-06-24" @default.
- W2037461305 creator A5037049166 @default.
- W2037461305 creator A5055462021 @default.
- W2037461305 creator A5059958623 @default.
- W2037461305 creator A5064831964 @default.
- W2037461305 creator A5074977563 @default.
- W2037461305 creator A5085344547 @default.
- W2037461305 date "2013-06-07" @default.
- W2037461305 modified "2023-10-16" @default.
- W2037461305 title "Improved iron gettering of contaminated multicrystalline silicon by high-temperature phosphorus diffusion" @default.
- W2037461305 cites W1965248888 @default.
- W2037461305 cites W1973528911 @default.
- W2037461305 cites W1975341744 @default.
- W2037461305 cites W1979426666 @default.
- W2037461305 cites W1980236068 @default.
- W2037461305 cites W1998870018 @default.
- W2037461305 cites W2007854679 @default.
- W2037461305 cites W2011859833 @default.
- W2037461305 cites W2013180643 @default.
- W2037461305 cites W2016141443 @default.
- W2037461305 cites W2017035621 @default.
- W2037461305 cites W2017159638 @default.
- W2037461305 cites W2026883943 @default.
- W2037461305 cites W2028850795 @default.
- W2037461305 cites W2030034278 @default.
- W2037461305 cites W2039421719 @default.
- W2037461305 cites W2040762104 @default.
- W2037461305 cites W2042501414 @default.
- W2037461305 cites W2043378701 @default.
- W2037461305 cites W2049102339 @default.
- W2037461305 cites W2050699088 @default.
- W2037461305 cites W2052612340 @default.
- W2037461305 cites W2063215465 @default.
- W2037461305 cites W2070603801 @default.
- W2037461305 cites W2082649310 @default.
- W2037461305 cites W2083001343 @default.
- W2037461305 cites W2098603169 @default.
- W2037461305 cites W2103248007 @default.
- W2037461305 cites W2109166097 @default.
- W2037461305 cites W2121333196 @default.
- W2037461305 cites W2133302050 @default.
- W2037461305 cites W2136358820 @default.
- W2037461305 cites W2138640206 @default.
- W2037461305 cites W2146771456 @default.
- W2037461305 cites W295443030 @default.
- W2037461305 cites W3095822720 @default.
- W2037461305 doi "https://doi.org/10.1063/1.4808310" @default.
- W2037461305 hasPublicationYear "2013" @default.
- W2037461305 type Work @default.
- W2037461305 sameAs 2037461305 @default.
- W2037461305 citedByCount "50" @default.
- W2037461305 countsByYear W20374613052013 @default.
- W2037461305 countsByYear W20374613052014 @default.
- W2037461305 countsByYear W20374613052015 @default.
- W2037461305 countsByYear W20374613052016 @default.
- W2037461305 countsByYear W20374613052017 @default.
- W2037461305 countsByYear W20374613052018 @default.
- W2037461305 countsByYear W20374613052019 @default.
- W2037461305 countsByYear W20374613052020 @default.
- W2037461305 countsByYear W20374613052021 @default.
- W2037461305 countsByYear W20374613052022 @default.
- W2037461305 crossrefType "journal-article" @default.
- W2037461305 hasAuthorship W2037461305A5037049166 @default.
- W2037461305 hasAuthorship W2037461305A5055462021 @default.
- W2037461305 hasAuthorship W2037461305A5059958623 @default.
- W2037461305 hasAuthorship W2037461305A5064831964 @default.
- W2037461305 hasAuthorship W2037461305A5074977563 @default.
- W2037461305 hasAuthorship W2037461305A5085344547 @default.
- W2037461305 hasBestOaLocation W20374613052 @default.
- W2037461305 hasConcept C107872376 @default.
- W2037461305 hasConcept C113196181 @default.
- W2037461305 hasConcept C121332964 @default.
- W2037461305 hasConcept C125099081 @default.
- W2037461305 hasConcept C147789679 @default.
- W2037461305 hasConcept C160671074 @default.
- W2037461305 hasConcept C171250308 @default.
- W2037461305 hasConcept C185592680 @default.
- W2037461305 hasConcept C191897082 @default.
- W2037461305 hasConcept C192562407 @default.
- W2037461305 hasConcept C198865614 @default.
- W2037461305 hasConcept C2777855556 @default.
- W2037461305 hasConcept C2778547858 @default.
- W2037461305 hasConcept C2780026712 @default.
- W2037461305 hasConcept C2780901251 @default.
- W2037461305 hasConcept C49040817 @default.
- W2037461305 hasConcept C510538283 @default.
- W2037461305 hasConcept C544778455 @default.
- W2037461305 hasConcept C544956773 @default.
- W2037461305 hasConcept C69357855 @default.
- W2037461305 hasConcept C88380143 @default.
- W2037461305 hasConcept C97355855 @default.
- W2037461305 hasConceptScore W2037461305C107872376 @default.
- W2037461305 hasConceptScore W2037461305C113196181 @default.
- W2037461305 hasConceptScore W2037461305C121332964 @default.
- W2037461305 hasConceptScore W2037461305C125099081 @default.
- W2037461305 hasConceptScore W2037461305C147789679 @default.
- W2037461305 hasConceptScore W2037461305C160671074 @default.