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- W2037461610 abstract "Calix[4]resorcinarene was functionalized by photoactive 2-diazo-1-naphthoquinone-4-sulfonyl chloride (2,1,4-DNQ-Cl) to form a single-component non-chemically amplified i-line molecular glass photoresist. This single-component molecular glass photoresist afforded clean 100 nm line patterns with i-line interference lithography." @default.
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- W2037461610 date "2013-01-01" @default.
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- W2037461610 title "An i-line molecular glass photoresist for high resolution patterning" @default.
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