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• W2037478641 abstract "New phase change materials development has become one of the most critical modules in the fabrication of low power consumption and good data retention phase change memory (PCM). Among various candidates of new phase change materials, SiSbTe (SST) is one of the most promising materials due to its benefits of low RESET current, high crystallization temperature, good adhesion and small volume shrinkage during phase change from amorphous to crystalline state. However, the oxidization of SST film was found when exposing to the atmosphere. By analyzing the depth profile of chemical states, we found oxygen more easily penetrated into the SST film and bonded with Si and Sb compared to GeSbTe (GST) film. The oxidization mechanism between SST and GST was briefly discussed. We achieved 80% improvement of oxidization issue by nitrogen and argon surface treatment. We proposed a manufacturing solution of SST for PCM." @default.
• W2037478641 created "2016-06-24" @default.
• W2037478641 creator A5002027778 @default.
• W2037478641 creator A5015154651 @default.
• W2037478641 creator A5017523037 @default.
• W2037478641 creator A5022328506 @default.
• W2037478641 creator A5028675439 @default.
• W2037478641 creator A5030683638 @default.
• W2037478641 creator A5033849972 @default.
• W2037478641 creator A5036087177 @default.
• W2037478641 creator A5036804926 @default.
• W2037478641 creator A5043643512 @default.
• W2037478641 creator A5058372890 @default.
• W2037478641 creator A5068470750 @default.
• W2037478641 creator A5073581034 @default.
• W2037478641 creator A5088887864 @default.
• W2037478641 creator A5090815103 @default.
• W2037478641 date "2013-01-24" @default.
• W2037478641 modified "2023-09-25" @default.
• W2037478641 title "A comparison of the Ge-Sb-Te and Si-Sb-Te film oxidization at atmosphere" @default.
• W2037478641 doi "https://doi.org/10.1117/12.2017630" @default.
• W2037478641 hasPublicationYear "2013" @default.
• W2037478641 type Work @default.
• W2037478641 sameAs 2037478641 @default.
• W2037478641 citedByCount "0" @default.
• W2037478641 crossrefType "proceedings-article" @default.
• W2037478641 hasAuthorship W2037478641A5002027778 @default.
• W2037478641 hasAuthorship W2037478641A5015154651 @default.
• W2037478641 hasAuthorship W2037478641A5017523037 @default.
• W2037478641 hasAuthorship W2037478641A5022328506 @default.
• W2037478641 hasAuthorship W2037478641A5028675439 @default.
• W2037478641 hasAuthorship W2037478641A5030683638 @default.
• W2037478641 hasAuthorship W2037478641A5033849972 @default.
• W2037478641 hasAuthorship W2037478641A5036087177 @default.
• W2037478641 hasAuthorship W2037478641A5036804926 @default.
• W2037478641 hasAuthorship W2037478641A5043643512 @default.
• W2037478641 hasAuthorship W2037478641A5058372890 @default.
• W2037478641 hasAuthorship W2037478641A5068470750 @default.
• W2037478641 hasAuthorship W2037478641A5073581034 @default.
• W2037478641 hasAuthorship W2037478641A5088887864 @default.
• W2037478641 hasAuthorship W2037478641A5090815103 @default.
• W2037478641 hasConcept C121332964 @default.
• W2037478641 hasConcept C127413603 @default.
• W2037478641 hasConcept C136525101 @default.
• W2037478641 hasConcept C142724271 @default.
• W2037478641 hasConcept C159985019 @default.
• W2037478641 hasConcept C171250308 @default.
• W2037478641 hasConcept C178790620 @default.
• W2037478641 hasConcept C180145272 @default.
• W2037478641 hasConcept C185592680 @default.
• W2037478641 hasConcept C192562407 @default.
• W2037478641 hasConcept C203036418 @default.
• W2037478641 hasConcept C204787440 @default.
• W2037478641 hasConcept C2779227376 @default.
• W2037478641 hasConcept C42360764 @default.
• W2037478641 hasConcept C44280652 @default.
• W2037478641 hasConcept C49040817 @default.
• W2037478641 hasConcept C540031477 @default.
• W2037478641 hasConcept C547737533 @default.
• W2037478641 hasConcept C56052488 @default.
• W2037478641 hasConcept C64142963 @default.
• W2037478641 hasConcept C65440619 @default.
• W2037478641 hasConcept C71924100 @default.
• W2037478641 hasConcept C8010536 @default.
• W2037478641 hasConcept C97355855 @default.
• W2037478641 hasConceptScore W2037478641C121332964 @default.
• W2037478641 hasConceptScore W2037478641C127413603 @default.
• W2037478641 hasConceptScore W2037478641C136525101 @default.
• W2037478641 hasConceptScore W2037478641C142724271 @default.
• W2037478641 hasConceptScore W2037478641C159985019 @default.
• W2037478641 hasConceptScore W2037478641C171250308 @default.
• W2037478641 hasConceptScore W2037478641C178790620 @default.
• W2037478641 hasConceptScore W2037478641C180145272 @default.
• W2037478641 hasConceptScore W2037478641C185592680 @default.
• W2037478641 hasConceptScore W2037478641C192562407 @default.
• W2037478641 hasConceptScore W2037478641C203036418 @default.
• W2037478641 hasConceptScore W2037478641C204787440 @default.
• W2037478641 hasConceptScore W2037478641C2779227376 @default.
• W2037478641 hasConceptScore W2037478641C42360764 @default.
• W2037478641 hasConceptScore W2037478641C44280652 @default.
• W2037478641 hasConceptScore W2037478641C49040817 @default.
• W2037478641 hasConceptScore W2037478641C540031477 @default.
• W2037478641 hasConceptScore W2037478641C547737533 @default.
• W2037478641 hasConceptScore W2037478641C56052488 @default.
• W2037478641 hasConceptScore W2037478641C64142963 @default.
• W2037478641 hasConceptScore W2037478641C65440619 @default.
• W2037478641 hasConceptScore W2037478641C71924100 @default.
• W2037478641 hasConceptScore W2037478641C8010536 @default.
• W2037478641 hasConceptScore W2037478641C97355855 @default.
• W2037478641 hasLocation W20374786411 @default.
• W2037478641 hasOpenAccess W2037478641 @default.
• W2037478641 hasPrimaryLocation W20374786411 @default.
• W2037478641 hasRelatedWork W12161609 @default.
• W2037478641 hasRelatedWork W1987905218 @default.
• W2037478641 hasRelatedWork W1991504204 @default.
• W2037478641 hasRelatedWork W2011184111 @default.
• W2037478641 hasRelatedWork W2018453583 @default.
• W2037478641 hasRelatedWork W2076782071 @default.
• W2037478641 hasRelatedWork W2357717480 @default.
• W2037478641 hasRelatedWork W2918887253 @default.

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