Matches in SemOpenAlex for { <https://semopenalex.org/work/W2037500979> ?p ?o ?g. }
Showing items 1 to 83 of
83
with 100 items per page.
- W2037500979 abstract "Summary form only given. In recent years, material processing technologies have been remarkably improved by the ever-growing research interest and efforts in nano-science along with plasma processing techniques. In particular, low-pressure plasma has been widely employed in the coating industry due to its capability of efficiently generating active species, responsible for layer deposition, in a low temperature environment (300 K to 600 K). These physical conditions are particularly suitable for surface modification of micron/sub-micron size particles, which are the important constituents of different classes of materials. The possibility of many combinations of particle and coating materials, and range of operating conditions, make the physico-chemical phenomena of coating complex. Consequently, a great deal of efforts has to be invested in developing predictive models capable of defining the optimum conditions for coating of such particles. In the present work, a hybrid model of kinetic theory and continuum theory for predicting coating of particles by plasma enhanced chemical vapor deposition in low-pressure conditions is used to study the effect of particle size on the physical processes occurring during deposition (i.e. particle charging, distribution of species in the particle surrounding, and layer deposition). In particular, we focus our interest on large particles. The chemical reaction model considers a CH <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>4</sub> /H <sub xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>2</sub> plasma consisting of 31 reactions that accounts for ionization and dissociation reactions, namely electron-neutral, ion-neutral, and neutral-neutral reactions. Ions and electrons are responsible for particle charging and for generation of self-bias electric field, whereas radicals account for particle layer growth. In a spherical symmetric geometry, up to a distance longer than one mean free path from the surface of the particle, reactive-diffusive phenomena occur and continuum theory is implemented to solve for species transport. Whereas, inside the so-called vacuum sphere around the particle no collisions occur and kinetic theory is applied" @default.
- W2037500979 created "2016-06-24" @default.
- W2037500979 creator A5000458332 @default.
- W2037500979 creator A5047138363 @default.
- W2037500979 creator A5058603985 @default.
- W2037500979 creator A5080937639 @default.
- W2037500979 date "2006-01-01" @default.
- W2037500979 modified "2023-09-27" @default.
- W2037500979 title "Particle coating low-pressure Ch/sub 4/H/sub 2/ plasma: The effect of particle size" @default.
- W2037500979 cites W1995464583 @default.
- W2037500979 doi "https://doi.org/10.1109/plasma.2006.1707118" @default.
- W2037500979 hasPublicationYear "2006" @default.
- W2037500979 type Work @default.
- W2037500979 sameAs 2037500979 @default.
- W2037500979 citedByCount "0" @default.
- W2037500979 crossrefType "proceedings-article" @default.
- W2037500979 hasAuthorship W2037500979A5000458332 @default.
- W2037500979 hasAuthorship W2037500979A5047138363 @default.
- W2037500979 hasAuthorship W2037500979A5058603985 @default.
- W2037500979 hasAuthorship W2037500979A5080937639 @default.
- W2037500979 hasConcept C111368507 @default.
- W2037500979 hasConcept C121332964 @default.
- W2037500979 hasConcept C127313418 @default.
- W2037500979 hasConcept C127413603 @default.
- W2037500979 hasConcept C145738678 @default.
- W2037500979 hasConcept C151730666 @default.
- W2037500979 hasConcept C159985019 @default.
- W2037500979 hasConcept C171250308 @default.
- W2037500979 hasConcept C185544564 @default.
- W2037500979 hasConcept C187530423 @default.
- W2037500979 hasConcept C192562407 @default.
- W2037500979 hasConcept C204323151 @default.
- W2037500979 hasConcept C2778517922 @default.
- W2037500979 hasConcept C2781448156 @default.
- W2037500979 hasConcept C2816523 @default.
- W2037500979 hasConcept C2961886 @default.
- W2037500979 hasConcept C42360764 @default.
- W2037500979 hasConcept C57410435 @default.
- W2037500979 hasConcept C60448018 @default.
- W2037500979 hasConcept C64297162 @default.
- W2037500979 hasConcept C82706917 @default.
- W2037500979 hasConcept C85344455 @default.
- W2037500979 hasConcept C86803240 @default.
- W2037500979 hasConceptScore W2037500979C111368507 @default.
- W2037500979 hasConceptScore W2037500979C121332964 @default.
- W2037500979 hasConceptScore W2037500979C127313418 @default.
- W2037500979 hasConceptScore W2037500979C127413603 @default.
- W2037500979 hasConceptScore W2037500979C145738678 @default.
- W2037500979 hasConceptScore W2037500979C151730666 @default.
- W2037500979 hasConceptScore W2037500979C159985019 @default.
- W2037500979 hasConceptScore W2037500979C171250308 @default.
- W2037500979 hasConceptScore W2037500979C185544564 @default.
- W2037500979 hasConceptScore W2037500979C187530423 @default.
- W2037500979 hasConceptScore W2037500979C192562407 @default.
- W2037500979 hasConceptScore W2037500979C204323151 @default.
- W2037500979 hasConceptScore W2037500979C2778517922 @default.
- W2037500979 hasConceptScore W2037500979C2781448156 @default.
- W2037500979 hasConceptScore W2037500979C2816523 @default.
- W2037500979 hasConceptScore W2037500979C2961886 @default.
- W2037500979 hasConceptScore W2037500979C42360764 @default.
- W2037500979 hasConceptScore W2037500979C57410435 @default.
- W2037500979 hasConceptScore W2037500979C60448018 @default.
- W2037500979 hasConceptScore W2037500979C64297162 @default.
- W2037500979 hasConceptScore W2037500979C82706917 @default.
- W2037500979 hasConceptScore W2037500979C85344455 @default.
- W2037500979 hasConceptScore W2037500979C86803240 @default.
- W2037500979 hasLocation W20375009791 @default.
- W2037500979 hasOpenAccess W2037500979 @default.
- W2037500979 hasPrimaryLocation W20375009791 @default.
- W2037500979 hasRelatedWork W2001976937 @default.
- W2037500979 hasRelatedWork W2044084862 @default.
- W2037500979 hasRelatedWork W2058971426 @default.
- W2037500979 hasRelatedWork W2060173807 @default.
- W2037500979 hasRelatedWork W2065700843 @default.
- W2037500979 hasRelatedWork W2349071758 @default.
- W2037500979 hasRelatedWork W2944206977 @default.
- W2037500979 hasRelatedWork W3160799975 @default.
- W2037500979 hasRelatedWork W4249402192 @default.
- W2037500979 hasRelatedWork W267183940 @default.
- W2037500979 isParatext "false" @default.
- W2037500979 isRetracted "false" @default.
- W2037500979 magId "2037500979" @default.
- W2037500979 workType "article" @default.