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• W2037604841 endingPage "075003" @default.
• W2037604841 startingPage "075003" @default.
• W2037604841 abstract "This paper reports the top-down fabrication of carbon nanotube (CNT) thin film on microelectrical mechanical systems (MEMS) and the characterization of the thermoelectric coefficients of aligned single-walled carbon nanotube (SWNT) forest film. The film was synthesized by water-assisted chemical vapor deposition (CVD), a process known as 'super-growth'. CNT film was then condensed, manually maneuvered, and conveniently patterned by electron beam (EB) lithography to form desirable shapes. We demonstrate this process by patterning an array of Au–CNT thermocouples; measurement under room temperature conditions reveals the Seebeck coefficient of aligned SWNT film to be 18–20 µV C − 1." @default.
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• W2037604841 date "2010-05-21" @default.
• W2037604841 modified "2023-09-27" @default.
• W2037604841 title "Integration of SWNT film into MEMS for a micro-thermoelectric device" @default.
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• W2037604841 doi "https://doi.org/10.1088/0964-1726/19/7/075003" @default.
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