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- W2037642244 abstract "After a survey of the present state of optics in microelectronics future possibilities especially of dioptric lenses are discussed. Those lenses are marked mainly by the numerical aperture providing the resolution, and the diameter of image field. The numerical aper-ture seems to have a usefull limit between 0.4 and 0.5, providing minimum line widths of 0.4 to 0.7 microns. A future limit of field sizes cannot be given today. The possibility to develop new lenses is not only given by the capability of the optical designer, but also by other parameters, such as mechanical size limitations and lens manufactoring problems." @default.
- W2037642244 created "2016-06-24" @default.
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- W2037642244 date "1977-08-08" @default.
- W2037642244 modified "2023-10-01" @default.
- W2037642244 title "<title>Future Possibilities Of Dioptric Lenses In Microelectronics</title>" @default.
- W2037642244 doi "https://doi.org/10.1117/12.955361" @default.
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