Matches in SemOpenAlex for { <https://semopenalex.org/work/W2037744164> ?p ?o ?g. }
Showing items 1 to 83 of
83
with 100 items per page.
- W2037744164 abstract "A planar magnetron sputtering device with thermally isolated sintered boron target has been designed and demonstrated. The magnetron is intended to use for generation of boron ion beams, as well as in plasma immersion implantation. For a boron target, high target temperature is required because boron has low electrical conductivity at room temperature, which increases with temperature. The target is well insulated thermally and can be heated by an initial low‐current, high‐voltage DC discharge mode. A discharge power of 16 W was adequate to reach the required surface temperature, after that a transition of the discharge to a high‐current, low‐voltage mode is observed. Applying high current pulses over the DC heating discharge results in a self‐sputtering operational mode of the magnetron discharge. Ion beam was extracted from the discharge plasma. Beam analysis was performed with a time‐of‐flight system. All the boron ions are single charged. The maximum boron ion fraction in the beam is greater than 99%, and the mean boron ion fraction, time‐integrated over the whole pulse length, is about 95%. This kind of boron ion source could be competitive to conventional boron ion sources that utilize compounds such as BF3, and could be useful for semiconductor industry application." @default.
- W2037744164 created "2016-06-24" @default.
- W2037744164 creator A5004943753 @default.
- W2037744164 creator A5045001956 @default.
- W2037744164 creator A5049535477 @default.
- W2037744164 creator A5055229721 @default.
- W2037744164 creator A5079358646 @default.
- W2037744164 creator A5084871410 @default.
- W2037744164 date "2011-01-01" @default.
- W2037744164 modified "2023-09-23" @default.
- W2037744164 title "Ion Source of Pure Single Charged Boron Based on Planar Magnetron Discharge in Self-Sputtering Mode" @default.
- W2037744164 cites W2063004829 @default.
- W2037744164 doi "https://doi.org/10.1063/1.3548454" @default.
- W2037744164 hasPublicationYear "2011" @default.
- W2037744164 type Work @default.
- W2037744164 sameAs 2037744164 @default.
- W2037744164 citedByCount "2" @default.
- W2037744164 countsByYear W20377441642019 @default.
- W2037744164 countsByYear W20377441642021 @default.
- W2037744164 crossrefType "proceedings-article" @default.
- W2037744164 hasAuthorship W2037744164A5004943753 @default.
- W2037744164 hasAuthorship W2037744164A5045001956 @default.
- W2037744164 hasAuthorship W2037744164A5049535477 @default.
- W2037744164 hasAuthorship W2037744164A5055229721 @default.
- W2037744164 hasAuthorship W2037744164A5079358646 @default.
- W2037744164 hasAuthorship W2037744164A5084871410 @default.
- W2037744164 hasConcept C113196181 @default.
- W2037744164 hasConcept C121332964 @default.
- W2037744164 hasConcept C123408415 @default.
- W2037744164 hasConcept C145148216 @default.
- W2037744164 hasConcept C171250308 @default.
- W2037744164 hasConcept C178790620 @default.
- W2037744164 hasConcept C184779094 @default.
- W2037744164 hasConcept C185592680 @default.
- W2037744164 hasConcept C188224857 @default.
- W2037744164 hasConcept C19067145 @default.
- W2037744164 hasConcept C192562407 @default.
- W2037744164 hasConcept C22423302 @default.
- W2037744164 hasConcept C41823505 @default.
- W2037744164 hasConcept C43617362 @default.
- W2037744164 hasConcept C49040817 @default.
- W2037744164 hasConcept C501308230 @default.
- W2037744164 hasConcept C50774322 @default.
- W2037744164 hasConcept C61427134 @default.
- W2037744164 hasConcept C62520636 @default.
- W2037744164 hasConcept C82706917 @default.
- W2037744164 hasConceptScore W2037744164C113196181 @default.
- W2037744164 hasConceptScore W2037744164C121332964 @default.
- W2037744164 hasConceptScore W2037744164C123408415 @default.
- W2037744164 hasConceptScore W2037744164C145148216 @default.
- W2037744164 hasConceptScore W2037744164C171250308 @default.
- W2037744164 hasConceptScore W2037744164C178790620 @default.
- W2037744164 hasConceptScore W2037744164C184779094 @default.
- W2037744164 hasConceptScore W2037744164C185592680 @default.
- W2037744164 hasConceptScore W2037744164C188224857 @default.
- W2037744164 hasConceptScore W2037744164C19067145 @default.
- W2037744164 hasConceptScore W2037744164C192562407 @default.
- W2037744164 hasConceptScore W2037744164C22423302 @default.
- W2037744164 hasConceptScore W2037744164C41823505 @default.
- W2037744164 hasConceptScore W2037744164C43617362 @default.
- W2037744164 hasConceptScore W2037744164C49040817 @default.
- W2037744164 hasConceptScore W2037744164C501308230 @default.
- W2037744164 hasConceptScore W2037744164C50774322 @default.
- W2037744164 hasConceptScore W2037744164C61427134 @default.
- W2037744164 hasConceptScore W2037744164C62520636 @default.
- W2037744164 hasConceptScore W2037744164C82706917 @default.
- W2037744164 hasLocation W20377441641 @default.
- W2037744164 hasOpenAccess W2037744164 @default.
- W2037744164 hasPrimaryLocation W20377441641 @default.
- W2037744164 hasRelatedWork W1495609493 @default.
- W2037744164 hasRelatedWork W1974568975 @default.
- W2037744164 hasRelatedWork W1990257181 @default.
- W2037744164 hasRelatedWork W1999622359 @default.
- W2037744164 hasRelatedWork W2018754993 @default.
- W2037744164 hasRelatedWork W2050808716 @default.
- W2037744164 hasRelatedWork W2132925456 @default.
- W2037744164 hasRelatedWork W2141545536 @default.
- W2037744164 hasRelatedWork W2598908802 @default.
- W2037744164 hasRelatedWork W2892946510 @default.
- W2037744164 isParatext "false" @default.
- W2037744164 isRetracted "false" @default.
- W2037744164 magId "2037744164" @default.
- W2037744164 workType "article" @default.