Matches in SemOpenAlex for { <https://semopenalex.org/work/W2037764010> ?p ?o ?g. }
- W2037764010 endingPage "412" @default.
- W2037764010 startingPage "405" @default.
- W2037764010 abstract "Diamond-like carbon (DLC) films with high hardness were formed by Ar cluster ion beam assisted deposition at room temperature, using C60 as a carbon source. The gas cluster ion beam (GCIB) assisted deposition was useful to form hard DLC films, as the bombardments induced high-pressure and high-temperature effects at the impact surface, and ultra low energy effects. When the acceleration energy of Ar cluster ion was 5 keV, the hardness of 50 GPa was obtained. This value was approximately two times higher than that of the films deposited with conventional methods. Wear-resistance properties were also higher than that of conventional films. Rough estimations of sp2 orbital in the films were carried out with Raman spectra, the films formed with Ar cluster ion bombardment had lower sp2 contents, which meant films had low fraction of graphite bonding. Thus DLC films exhibiting higher physical characteristics and lower graphite bonding were obtained with GCIB assisted deposition." @default.
- W2037764010 created "2016-06-24" @default.
- W2037764010 creator A5009414859 @default.
- W2037764010 creator A5018101394 @default.
- W2037764010 creator A5027277032 @default.
- W2037764010 creator A5050316548 @default.
- W2037764010 creator A5058206284 @default.
- W2037764010 creator A5063678189 @default.
- W2037764010 creator A5065525021 @default.
- W2037764010 date "2003-02-01" @default.
- W2037764010 modified "2023-10-01" @default.
- W2037764010 title "Hard DLC film formation by gas cluster ion beam assisted deposition" @default.
- W2037764010 cites W1976705497 @default.
- W2037764010 cites W1981106362 @default.
- W2037764010 cites W1993881132 @default.
- W2037764010 cites W1998538077 @default.
- W2037764010 cites W2006967037 @default.
- W2037764010 cites W2010717245 @default.
- W2037764010 cites W2020574524 @default.
- W2037764010 cites W2031918282 @default.
- W2037764010 cites W2032014505 @default.
- W2037764010 cites W2038404392 @default.
- W2037764010 cites W2047813746 @default.
- W2037764010 cites W2053376153 @default.
- W2037764010 cites W2058272047 @default.
- W2037764010 cites W2076933927 @default.
- W2037764010 cites W2079456150 @default.
- W2037764010 cites W2086817751 @default.
- W2037764010 cites W2087329515 @default.
- W2037764010 cites W2089640706 @default.
- W2037764010 cites W2095515966 @default.
- W2037764010 doi "https://doi.org/10.1016/s0168-583x(02)01739-1" @default.
- W2037764010 hasPublicationYear "2003" @default.
- W2037764010 type Work @default.
- W2037764010 sameAs 2037764010 @default.
- W2037764010 citedByCount "37" @default.
- W2037764010 countsByYear W20377640102012 @default.
- W2037764010 countsByYear W20377640102013 @default.
- W2037764010 countsByYear W20377640102014 @default.
- W2037764010 countsByYear W20377640102015 @default.
- W2037764010 countsByYear W20377640102016 @default.
- W2037764010 countsByYear W20377640102017 @default.
- W2037764010 countsByYear W20377640102019 @default.
- W2037764010 countsByYear W20377640102021 @default.
- W2037764010 countsByYear W20377640102022 @default.
- W2037764010 countsByYear W20377640102023 @default.
- W2037764010 crossrefType "journal-article" @default.
- W2037764010 hasAuthorship W2037764010A5009414859 @default.
- W2037764010 hasAuthorship W2037764010A5018101394 @default.
- W2037764010 hasAuthorship W2037764010A5027277032 @default.
- W2037764010 hasAuthorship W2037764010A5050316548 @default.
- W2037764010 hasAuthorship W2037764010A5058206284 @default.
- W2037764010 hasAuthorship W2037764010A5063678189 @default.
- W2037764010 hasAuthorship W2037764010A5065525021 @default.
- W2037764010 hasConcept C104779481 @default.
- W2037764010 hasConcept C113196181 @default.
- W2037764010 hasConcept C120665830 @default.
- W2037764010 hasConcept C121332964 @default.
- W2037764010 hasConcept C123380192 @default.
- W2037764010 hasConcept C140205800 @default.
- W2037764010 hasConcept C145148216 @default.
- W2037764010 hasConcept C151730666 @default.
- W2037764010 hasConcept C159985019 @default.
- W2037764010 hasConcept C164866538 @default.
- W2037764010 hasConcept C171250308 @default.
- W2037764010 hasConcept C178790620 @default.
- W2037764010 hasConcept C185592680 @default.
- W2037764010 hasConcept C19067145 @default.
- W2037764010 hasConcept C192562407 @default.
- W2037764010 hasConcept C199360897 @default.
- W2037764010 hasConcept C2779698641 @default.
- W2037764010 hasConcept C2781463530 @default.
- W2037764010 hasConcept C2816523 @default.
- W2037764010 hasConcept C40003534 @default.
- W2037764010 hasConcept C41008148 @default.
- W2037764010 hasConcept C50774322 @default.
- W2037764010 hasConcept C64297162 @default.
- W2037764010 hasConcept C75937256 @default.
- W2037764010 hasConcept C86803240 @default.
- W2037764010 hasConcept C93106096 @default.
- W2037764010 hasConceptScore W2037764010C104779481 @default.
- W2037764010 hasConceptScore W2037764010C113196181 @default.
- W2037764010 hasConceptScore W2037764010C120665830 @default.
- W2037764010 hasConceptScore W2037764010C121332964 @default.
- W2037764010 hasConceptScore W2037764010C123380192 @default.
- W2037764010 hasConceptScore W2037764010C140205800 @default.
- W2037764010 hasConceptScore W2037764010C145148216 @default.
- W2037764010 hasConceptScore W2037764010C151730666 @default.
- W2037764010 hasConceptScore W2037764010C159985019 @default.
- W2037764010 hasConceptScore W2037764010C164866538 @default.
- W2037764010 hasConceptScore W2037764010C171250308 @default.
- W2037764010 hasConceptScore W2037764010C178790620 @default.
- W2037764010 hasConceptScore W2037764010C185592680 @default.
- W2037764010 hasConceptScore W2037764010C19067145 @default.
- W2037764010 hasConceptScore W2037764010C192562407 @default.
- W2037764010 hasConceptScore W2037764010C199360897 @default.
- W2037764010 hasConceptScore W2037764010C2779698641 @default.
- W2037764010 hasConceptScore W2037764010C2781463530 @default.