Matches in SemOpenAlex for { <https://semopenalex.org/work/W2037771288> ?p ?o ?g. }
Showing items 1 to 84 of
84
with 100 items per page.
- W2037771288 abstract "This paper presents a review of single crystal silicon bulk acoustic wave resonators and filters. Silicon-on-insulator (SOI) substrates are utilized to implement high quality factor (Q) integrated silicon resonators with capacitive and/or piezoelectric transducers. These resonators cover a wide range of frequencies including HF, VHF and UHF." @default.
- W2037771288 created "2016-06-24" @default.
- W2037771288 creator A5004662031 @default.
- W2037771288 creator A5022358493 @default.
- W2037771288 creator A5029918075 @default.
- W2037771288 creator A5081523432 @default.
- W2037771288 date "2006-01-01" @default.
- W2037771288 modified "2023-10-17" @default.
- W2037771288 title "High-Aspect-Ratio SOI Vibrating Micromechanical Resonators and Filters" @default.
- W2037771288 cites W1484357306 @default.
- W2037771288 cites W1864680522 @default.
- W2037771288 cites W2079289673 @default.
- W2037771288 cites W2097567794 @default.
- W2037771288 cites W2124413043 @default.
- W2037771288 cites W2147287527 @default.
- W2037771288 cites W2161543627 @default.
- W2037771288 cites W2182966584 @default.
- W2037771288 cites W2542853413 @default.
- W2037771288 cites W2547259278 @default.
- W2037771288 cites W634727984 @default.
- W2037771288 doi "https://doi.org/10.1109/mwsym.2006.249705" @default.
- W2037771288 hasPublicationYear "2006" @default.
- W2037771288 type Work @default.
- W2037771288 sameAs 2037771288 @default.
- W2037771288 citedByCount "11" @default.
- W2037771288 countsByYear W20377712882015 @default.
- W2037771288 countsByYear W20377712882016 @default.
- W2037771288 countsByYear W20377712882017 @default.
- W2037771288 countsByYear W20377712882020 @default.
- W2037771288 countsByYear W20377712882021 @default.
- W2037771288 crossrefType "proceedings-article" @default.
- W2037771288 hasAuthorship W2037771288A5004662031 @default.
- W2037771288 hasAuthorship W2037771288A5022358493 @default.
- W2037771288 hasAuthorship W2037771288A5029918075 @default.
- W2037771288 hasAuthorship W2037771288A5081523432 @default.
- W2037771288 hasConcept C100082104 @default.
- W2037771288 hasConcept C119599485 @default.
- W2037771288 hasConcept C121332964 @default.
- W2037771288 hasConcept C127413603 @default.
- W2037771288 hasConcept C159985019 @default.
- W2037771288 hasConcept C187725362 @default.
- W2037771288 hasConcept C192562407 @default.
- W2037771288 hasConcept C206755178 @default.
- W2037771288 hasConcept C24326235 @default.
- W2037771288 hasConcept C24890656 @default.
- W2037771288 hasConcept C49040817 @default.
- W2037771288 hasConcept C53143962 @default.
- W2037771288 hasConcept C544956773 @default.
- W2037771288 hasConcept C56318395 @default.
- W2037771288 hasConcept C58772458 @default.
- W2037771288 hasConcept C97126364 @default.
- W2037771288 hasConceptScore W2037771288C100082104 @default.
- W2037771288 hasConceptScore W2037771288C119599485 @default.
- W2037771288 hasConceptScore W2037771288C121332964 @default.
- W2037771288 hasConceptScore W2037771288C127413603 @default.
- W2037771288 hasConceptScore W2037771288C159985019 @default.
- W2037771288 hasConceptScore W2037771288C187725362 @default.
- W2037771288 hasConceptScore W2037771288C192562407 @default.
- W2037771288 hasConceptScore W2037771288C206755178 @default.
- W2037771288 hasConceptScore W2037771288C24326235 @default.
- W2037771288 hasConceptScore W2037771288C24890656 @default.
- W2037771288 hasConceptScore W2037771288C49040817 @default.
- W2037771288 hasConceptScore W2037771288C53143962 @default.
- W2037771288 hasConceptScore W2037771288C544956773 @default.
- W2037771288 hasConceptScore W2037771288C56318395 @default.
- W2037771288 hasConceptScore W2037771288C58772458 @default.
- W2037771288 hasConceptScore W2037771288C97126364 @default.
- W2037771288 hasLocation W20377712881 @default.
- W2037771288 hasOpenAccess W2037771288 @default.
- W2037771288 hasPrimaryLocation W20377712881 @default.
- W2037771288 hasRelatedWork W1512862513 @default.
- W2037771288 hasRelatedWork W1983251005 @default.
- W2037771288 hasRelatedWork W2030471483 @default.
- W2037771288 hasRelatedWork W2048928383 @default.
- W2037771288 hasRelatedWork W2050507508 @default.
- W2037771288 hasRelatedWork W2162305565 @default.
- W2037771288 hasRelatedWork W2238919743 @default.
- W2037771288 hasRelatedWork W2301376657 @default.
- W2037771288 hasRelatedWork W2566062678 @default.
- W2037771288 hasRelatedWork W2995573418 @default.
- W2037771288 isParatext "false" @default.
- W2037771288 isRetracted "false" @default.
- W2037771288 magId "2037771288" @default.
- W2037771288 workType "article" @default.