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• W2037798507 endingPage "L777" @default.
• W2037798507 startingPage "L775" @default.
• W2037798507 abstract "A possible role of OH radicals in the formation mechanism of ZnO thin films by remote plasmaenhanced metalorganic chemical vapor deposition (RPE-MOCVD) was investigated. The plasma was generated by a radio frequency discharge in O2. The change of the carrier gas from H2 to N2 resulted in a significant decrease in deposition rate. Moreover, growth rate changed also with the content of H2 of an oxygen-hydrogen mixture gas in a reactor. Optical spectroscopic investigation of the light emitted by the reactor gas in the vicinity of a substrate showed that the effect of the carrier gas on deposition rate is related to the occurrence of OH radicals." @default.
• W2037798507 created "2016-06-24" @default.
• W2037798507 creator A5006868583 @default.
• W2037798507 creator A5018620798 @default.
• W2037798507 creator A5033136099 @default.
• W2037798507 creator A5044568397 @default.
• W2037798507 creator A5057513061 @default.
• W2037798507 creator A5074765604 @default.
• W2037798507 date "2003-07-01" @default.
• W2037798507 modified "2023-09-26" @default.
• W2037798507 title "OH Radical Activation of ZnO Growth in Remote Plasma Metalorganic Chemical Vapor Deposition" @default.
• W2037798507 cites W2003572212 @default.
• W2037798507 cites W2015919072 @default.
• W2037798507 cites W2124952229 @default.
• W2037798507 doi "https://doi.org/10.1143/jjap.42.l775" @default.
• W2037798507 hasPublicationYear "2003" @default.
• W2037798507 type Work @default.
• W2037798507 sameAs 2037798507 @default.
• W2037798507 citedByCount "8" @default.
• W2037798507 countsByYear W20377985072017 @default.
• W2037798507 crossrefType "journal-article" @default.
• W2037798507 hasAuthorship W2037798507A5006868583 @default.
• W2037798507 hasAuthorship W2037798507A5018620798 @default.
• W2037798507 hasAuthorship W2037798507A5033136099 @default.
• W2037798507 hasAuthorship W2037798507A5044568397 @default.
• W2037798507 hasAuthorship W2037798507A5057513061 @default.
• W2037798507 hasAuthorship W2037798507A5074765604 @default.
• W2037798507 hasBestOaLocation W20377985071 @default.
• W2037798507 hasConcept C107872376 @default.
• W2037798507 hasConcept C110738630 @default.
• W2037798507 hasConcept C111368507 @default.
• W2037798507 hasConcept C113196181 @default.
• W2037798507 hasConcept C121332964 @default.
• W2037798507 hasConcept C127313418 @default.
• W2037798507 hasConcept C139066938 @default.
• W2037798507 hasConcept C151730666 @default.
• W2037798507 hasConcept C171250308 @default.
• W2037798507 hasConcept C175665537 @default.
• W2037798507 hasConcept C178790620 @default.
• W2037798507 hasConcept C179104552 @default.
• W2037798507 hasConcept C185592680 @default.
• W2037798507 hasConcept C19067145 @default.
• W2037798507 hasConcept C192562407 @default.
• W2037798507 hasConcept C2777289219 @default.
• W2037798507 hasConcept C2779227376 @default.
• W2037798507 hasConcept C2780740191 @default.
• W2037798507 hasConcept C2816523 @default.
• W2037798507 hasConcept C38347018 @default.
• W2037798507 hasConcept C512968161 @default.
• W2037798507 hasConcept C540031477 @default.
• W2037798507 hasConcept C57410435 @default.
• W2037798507 hasConcept C62520636 @default.
• W2037798507 hasConcept C64297162 @default.
• W2037798507 hasConcept C75473681 @default.
• W2037798507 hasConcept C82706917 @default.
• W2037798507 hasConcept C86803240 @default.
• W2037798507 hasConceptScore W2037798507C107872376 @default.
• W2037798507 hasConceptScore W2037798507C110738630 @default.
• W2037798507 hasConceptScore W2037798507C111368507 @default.
• W2037798507 hasConceptScore W2037798507C113196181 @default.
• W2037798507 hasConceptScore W2037798507C121332964 @default.
• W2037798507 hasConceptScore W2037798507C127313418 @default.
• W2037798507 hasConceptScore W2037798507C139066938 @default.
• W2037798507 hasConceptScore W2037798507C151730666 @default.
• W2037798507 hasConceptScore W2037798507C171250308 @default.
• W2037798507 hasConceptScore W2037798507C175665537 @default.
• W2037798507 hasConceptScore W2037798507C178790620 @default.
• W2037798507 hasConceptScore W2037798507C179104552 @default.
• W2037798507 hasConceptScore W2037798507C185592680 @default.
• W2037798507 hasConceptScore W2037798507C19067145 @default.
• W2037798507 hasConceptScore W2037798507C192562407 @default.
• W2037798507 hasConceptScore W2037798507C2777289219 @default.
• W2037798507 hasConceptScore W2037798507C2779227376 @default.
• W2037798507 hasConceptScore W2037798507C2780740191 @default.
• W2037798507 hasConceptScore W2037798507C2816523 @default.
• W2037798507 hasConceptScore W2037798507C38347018 @default.
• W2037798507 hasConceptScore W2037798507C512968161 @default.
• W2037798507 hasConceptScore W2037798507C540031477 @default.
• W2037798507 hasConceptScore W2037798507C57410435 @default.
• W2037798507 hasConceptScore W2037798507C62520636 @default.
• W2037798507 hasConceptScore W2037798507C64297162 @default.
• W2037798507 hasConceptScore W2037798507C75473681 @default.
• W2037798507 hasConceptScore W2037798507C82706917 @default.
• W2037798507 hasConceptScore W2037798507C86803240 @default.
• W2037798507 hasIssue "Part 2, No. 7A" @default.
• W2037798507 hasLocation W20377985071 @default.
• W2037798507 hasOpenAccess W2037798507 @default.
• W2037798507 hasPrimaryLocation W20377985071 @default.
• W2037798507 hasRelatedWork W1967465319 @default.
• W2037798507 hasRelatedWork W1990222975 @default.
• W2037798507 hasRelatedWork W1994949098 @default.
• W2037798507 hasRelatedWork W2026736255 @default.
• W2037798507 hasRelatedWork W2037798507 @default.
• W2037798507 hasRelatedWork W2065151108 @default.
• W2037798507 hasRelatedWork W2070965462 @default.
• W2037798507 hasRelatedWork W2313995369 @default.
• W2037798507 hasRelatedWork W2379688728 @default.
• W2037798507 hasRelatedWork W3144697431 @default.

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