Matches in SemOpenAlex for { <https://semopenalex.org/work/W2037818253> ?p ?o ?g. }
- W2037818253 endingPage "961" @default.
- W2037818253 startingPage "954" @default.
- W2037818253 abstract "Polymethacrylates with tert-alcohol ester were synthesized as negative-tone chemical amplification photoresists (CAMPs) for 193-nm microlithography. The acid-catalyzed dehydration reaction of the CAMPs was analyzed via Fourier transform infrared. The crosslinking behavior following the dehydration reaction of the exposed CAMPs made it possible for them to be used as negative-tone photoresists. During the postexposure-baking process of the resists, the decay of the active proton concentration due to the evaporation and trapping of the active acid was lumped to a time constant (τ). Kinetic studies revealed this dehydration reaction was the first order to the hydroxy group and proton concentration. The introduction of the isobornyl methacrylate monomer into the resists produced a higher glass-transition temperature as well as a higher reactive ion etching resistance. The lithographic performance was investigated by use of isopropyl alcohol as a developer under various processing conditions. © 2000 John Wiley & Sons, Inc. J Polym Sci A: Polym Chem 38: 954–961, 2000" @default.
- W2037818253 created "2016-06-24" @default.
- W2037818253 creator A5033209256 @default.
- W2037818253 creator A5083080752 @default.
- W2037818253 date "2000-03-15" @default.
- W2037818253 modified "2023-09-24" @default.
- W2037818253 title "The kinetics of a negative-tone acrylic photoresist for 193-nm lithography" @default.
- W2037818253 cites W1964547962 @default.
- W2037818253 cites W1965428079 @default.
- W2037818253 cites W1965953339 @default.
- W2037818253 cites W1966201431 @default.
- W2037818253 cites W1971425503 @default.
- W2037818253 cites W1979860876 @default.
- W2037818253 cites W1980261913 @default.
- W2037818253 cites W1989530990 @default.
- W2037818253 cites W1993552610 @default.
- W2037818253 cites W1997983535 @default.
- W2037818253 cites W2017681714 @default.
- W2037818253 cites W2017822192 @default.
- W2037818253 cites W2022119624 @default.
- W2037818253 cites W2026710511 @default.
- W2037818253 cites W2050923727 @default.
- W2037818253 cites W2055313613 @default.
- W2037818253 cites W2058483223 @default.
- W2037818253 cites W2081852577 @default.
- W2037818253 cites W2082493070 @default.
- W2037818253 cites W2087193712 @default.
- W2037818253 cites W2101210298 @default.
- W2037818253 cites W2145930691 @default.
- W2037818253 cites W2483727638 @default.
- W2037818253 doi "https://doi.org/10.1002/(sici)1099-0518(20000315)38:6<954::aid-pola4>3.0.co;2-x" @default.
- W2037818253 hasPublicationYear "2000" @default.
- W2037818253 type Work @default.
- W2037818253 sameAs 2037818253 @default.
- W2037818253 citedByCount "2" @default.
- W2037818253 crossrefType "journal-article" @default.
- W2037818253 hasAuthorship W2037818253A5033209256 @default.
- W2037818253 hasAuthorship W2037818253A5083080752 @default.
- W2037818253 hasBestOaLocation W20378182532 @default.
- W2037818253 hasConcept C121332964 @default.
- W2037818253 hasConcept C127413603 @default.
- W2037818253 hasConcept C132050475 @default.
- W2037818253 hasConcept C134406635 @default.
- W2037818253 hasConcept C148898269 @default.
- W2037818253 hasConcept C160892712 @default.
- W2037818253 hasConcept C166940927 @default.
- W2037818253 hasConcept C178790620 @default.
- W2037818253 hasConcept C185592680 @default.
- W2037818253 hasConcept C188027245 @default.
- W2037818253 hasConcept C192562407 @default.
- W2037818253 hasConcept C204223013 @default.
- W2037818253 hasConcept C2775850501 @default.
- W2037818253 hasConcept C2777935641 @default.
- W2037818253 hasConcept C2778769901 @default.
- W2037818253 hasConcept C2779227376 @default.
- W2037818253 hasConcept C2780503075 @default.
- W2037818253 hasConcept C42360764 @default.
- W2037818253 hasConcept C49040817 @default.
- W2037818253 hasConcept C521977710 @default.
- W2037818253 hasConcept C53524968 @default.
- W2037818253 hasConcept C55493867 @default.
- W2037818253 hasConcept C62520636 @default.
- W2037818253 hasConcept C75473681 @default.
- W2037818253 hasConceptScore W2037818253C121332964 @default.
- W2037818253 hasConceptScore W2037818253C127413603 @default.
- W2037818253 hasConceptScore W2037818253C132050475 @default.
- W2037818253 hasConceptScore W2037818253C134406635 @default.
- W2037818253 hasConceptScore W2037818253C148898269 @default.
- W2037818253 hasConceptScore W2037818253C160892712 @default.
- W2037818253 hasConceptScore W2037818253C166940927 @default.
- W2037818253 hasConceptScore W2037818253C178790620 @default.
- W2037818253 hasConceptScore W2037818253C185592680 @default.
- W2037818253 hasConceptScore W2037818253C188027245 @default.
- W2037818253 hasConceptScore W2037818253C192562407 @default.
- W2037818253 hasConceptScore W2037818253C204223013 @default.
- W2037818253 hasConceptScore W2037818253C2775850501 @default.
- W2037818253 hasConceptScore W2037818253C2777935641 @default.
- W2037818253 hasConceptScore W2037818253C2778769901 @default.
- W2037818253 hasConceptScore W2037818253C2779227376 @default.
- W2037818253 hasConceptScore W2037818253C2780503075 @default.
- W2037818253 hasConceptScore W2037818253C42360764 @default.
- W2037818253 hasConceptScore W2037818253C49040817 @default.
- W2037818253 hasConceptScore W2037818253C521977710 @default.
- W2037818253 hasConceptScore W2037818253C53524968 @default.
- W2037818253 hasConceptScore W2037818253C55493867 @default.
- W2037818253 hasConceptScore W2037818253C62520636 @default.
- W2037818253 hasConceptScore W2037818253C75473681 @default.
- W2037818253 hasIssue "6" @default.
- W2037818253 hasLocation W20378182531 @default.
- W2037818253 hasLocation W20378182532 @default.
- W2037818253 hasOpenAccess W2037818253 @default.
- W2037818253 hasPrimaryLocation W20378182531 @default.
- W2037818253 hasRelatedWork W1965953339 @default.
- W2037818253 hasRelatedWork W1973041957 @default.
- W2037818253 hasRelatedWork W1975356349 @default.
- W2037818253 hasRelatedWork W1983233054 @default.
- W2037818253 hasRelatedWork W1994229084 @default.
- W2037818253 hasRelatedWork W1994481720 @default.