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- W2037859110 abstract "Various resists, which consisted of polymer systems, such as methacrylate, acrylate and cycloolefin/maleic anhydride (COMA), were investigated in the viewpoint of etching resistance, lithographic performance and shelf life. The oxide etching rate was in order of acrylate < methacrylate << COMA. The surface roughness of the acrylate type resist after oxide etching was the smallest among all samples. The methacrylate type resist showed high resolution capability as a line and space resist. On the other hand, pattern collapse was observed in the acrylate type resist, and low resolution was shown in the COMA type resist because of the large resist thickness loss. In the case of contacts, the acrylate type resist showed better linearity. The sensitivity of the acrylate and methacrylate type resists kept at room temperature did not changed in 20 days, while the sensitivity of the COMA type resist changed. It was found that the methacrylate type resist was the most suitable as a line and space resist and the acrylate type resist was the most promising as a contact hole resist." @default.
- W2037859110 created "2016-06-24" @default.
- W2037859110 creator A5000683962 @default.
- W2037859110 creator A5023298473 @default.
- W2037859110 creator A5042975533 @default.
- W2037859110 creator A5043828919 @default.
- W2037859110 creator A5044826232 @default.
- W2037859110 creator A5050280214 @default.
- W2037859110 creator A5053036229 @default.
- W2037859110 creator A5081290321 @default.
- W2037859110 date "2003-06-11" @default.
- W2037859110 modified "2023-09-24" @default.
- W2037859110 title "Investigation of the polymer systems for ArF resists" @default.
- W2037859110 doi "https://doi.org/10.1117/12.485105" @default.
- W2037859110 hasPublicationYear "2003" @default.
- W2037859110 type Work @default.
- W2037859110 sameAs 2037859110 @default.
- W2037859110 citedByCount "1" @default.
- W2037859110 crossrefType "proceedings-article" @default.
- W2037859110 hasAuthorship W2037859110A5000683962 @default.
- W2037859110 hasAuthorship W2037859110A5023298473 @default.
- W2037859110 hasAuthorship W2037859110A5042975533 @default.
- W2037859110 hasAuthorship W2037859110A5043828919 @default.
- W2037859110 hasAuthorship W2037859110A5044826232 @default.
- W2037859110 hasAuthorship W2037859110A5050280214 @default.
- W2037859110 hasAuthorship W2037859110A5053036229 @default.
- W2037859110 hasAuthorship W2037859110A5081290321 @default.
- W2037859110 hasConcept C100460472 @default.
- W2037859110 hasConcept C132050475 @default.
- W2037859110 hasConcept C15920480 @default.
- W2037859110 hasConcept C159985019 @default.
- W2037859110 hasConcept C192562407 @default.
- W2037859110 hasConcept C2779227376 @default.
- W2037859110 hasConcept C2779989194 @default.
- W2037859110 hasConcept C521977710 @default.
- W2037859110 hasConcept C53524968 @default.
- W2037859110 hasConceptScore W2037859110C100460472 @default.
- W2037859110 hasConceptScore W2037859110C132050475 @default.
- W2037859110 hasConceptScore W2037859110C15920480 @default.
- W2037859110 hasConceptScore W2037859110C159985019 @default.
- W2037859110 hasConceptScore W2037859110C192562407 @default.
- W2037859110 hasConceptScore W2037859110C2779227376 @default.
- W2037859110 hasConceptScore W2037859110C2779989194 @default.
- W2037859110 hasConceptScore W2037859110C521977710 @default.
- W2037859110 hasConceptScore W2037859110C53524968 @default.
- W2037859110 hasLocation W20378591101 @default.
- W2037859110 hasOpenAccess W2037859110 @default.
- W2037859110 hasPrimaryLocation W20378591101 @default.
- W2037859110 hasRelatedWork W1975584425 @default.
- W2037859110 hasRelatedWork W1984985132 @default.
- W2037859110 hasRelatedWork W2034579492 @default.
- W2037859110 hasRelatedWork W2054561009 @default.
- W2037859110 hasRelatedWork W2076275541 @default.
- W2037859110 hasRelatedWork W2088678762 @default.
- W2037859110 hasRelatedWork W2088985844 @default.
- W2037859110 hasRelatedWork W2089224529 @default.
- W2037859110 hasRelatedWork W2090089314 @default.
- W2037859110 hasRelatedWork W2101210298 @default.
- W2037859110 isParatext "false" @default.
- W2037859110 isRetracted "false" @default.
- W2037859110 magId "2037859110" @default.
- W2037859110 workType "article" @default.