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- W2038042658 abstract "In this paper, the experimental synthesis of diamond films and optical emission spectroscopy (OES) of the gaseous phase species are studied in the range of substrate temperature from Ts = 300°C to 850°C. The high quality sub-microcrystalline diamond films are successfully deposited at substrate temperature (330 ≈ 340)°C by adopting glow plasma assisted hot filament chemical vapor deposition (GPCVD). For the first time, <i>in situ</i> OES is applied to diagnose weak signal of GPCVD system when CH<sub>4</sub> and H<sub>2</sub> are used as the input gas, and the reactive species are identified in diamond growth processes. A primary model of diamond films growing at low temperature is presented by studying dynamic behavior for nonequilibrium plasma reactions." @default.
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- W2038042658 date "2002-09-18" @default.
- W2038042658 modified "2023-10-13" @default.
- W2038042658 title "Synthesis of diamond films at low temperature and study of nonlinear dynamic synthesis process" @default.
- W2038042658 doi "https://doi.org/10.1117/12.465651" @default.
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