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- W2038051507 abstract "Highly c-axis oriented zinc oxide, ZnO, thin film has been obtained at a very low pre-heating temperature, 120 °C. After depositing all layers, the film is annealed at 350 °C, for 5 h. The deposition process is designed to be compatible with silicon/silicon-dioxide substrates, to make piezoelectric coatings for integrated smart sensors. The films are synthesized by the sol–gel method and deposited onto a glass substrate. The deposition solution is prepared by dissolving zinc-acetate 2-hydrate in methanol. To optimize the film quality with respect to c-axis orientation, and surface uniformity, the selected parameters are: pre-heating temperature, spin-coating speed and number of coating layers. The effect of the deposition conditions is studied by applying experimental design and response surface techniques on the characteristic (002) peak, obtained by X-ray diffraction analysis. Surface uniformity and grain size are observed by scanning electron microscopy." @default.
- W2038051507 created "2016-06-24" @default.
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- W2038051507 date "2008-07-01" @default.
- W2038051507 modified "2023-10-14" @default.
- W2038051507 title "Pre-heating temperature dependence of the c-axis orientation of ZnO thin films" @default.
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- W2038051507 doi "https://doi.org/10.1016/j.tsf.2007.11.111" @default.
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