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• W2038372414 endingPage "D97" @default.
• W2038372414 startingPage "D97" @default.
• W2038372414 abstract "A concept of maskless electrochemical microfabrication has been presented. In this method, a substrate, which is the anode, is placed in an electrochemical reactor in close proximity to a tool carrying the micropattern, which is the cathode. Although the anode is etched over its entire surface, it etches at a higher rate on the areas opposing exposed regions of the cathode, hence, reproducing a pattern on the anode. This paper describes the electrochemical process that enables the transfer of micropatterns from the cathode to the anode. This investigation involved the development of a mathematical model for anodic dissolution from a substrate, which was tested and verified against experimental data. The model was solved using commercial software that allows the simultaneous solution of reaction distribution at two different length scales, millimeter and micrometer. It has been applied to copper dissolution in acidified and nonacidified media. The results show that selective etching in acidified media produces a surface topography that is sinusoidal, whereas a rectangular topography is obtained in nonacidified media due to the formation of an oxide at the surface." @default.
• W2038372414 created "2016-06-24" @default.
• W2038372414 creator A5055159131 @default.
• W2038372414 creator A5061723353 @default.
• W2038372414 date "2008-01-01" @default.
• W2038372414 modified "2023-09-24" @default.
• W2038372414 title "Electrochemical Process for Micropattern Transfer Without Photolithography: A Modeling Analysis" @default.
• W2038372414 cites W1966525473 @default.
• W2038372414 cites W1968993405 @default.
• W2038372414 cites W1992623724 @default.
• W2038372414 cites W2001717407 @default.
• W2038372414 cites W2023544894 @default.
• W2038372414 cites W2034859241 @default.
• W2038372414 cites W2048345566 @default.
• W2038372414 cites W2058472376 @default.
• W2038372414 cites W2060647241 @default.
• W2038372414 cites W2078321682 @default.
• W2038372414 cites W2079173516 @default.
• W2038372414 cites W2079389741 @default.
• W2038372414 cites W2084365949 @default.
• W2038372414 cites W2091123330 @default.
• W2038372414 cites W2152717876 @default.
• W2038372414 cites W2471114222 @default.
• W2038372414 cites W2596039924 @default.
• W2038372414 cites W4230871066 @default.
• W2038372414 cites W4251843769 @default.
• W2038372414 cites W4253816275 @default.
• W2038372414 doi "https://doi.org/10.1149/1.2806032" @default.
• W2038372414 hasPublicationYear "2008" @default.
• W2038372414 type Work @default.
• W2038372414 sameAs 2038372414 @default.
• W2038372414 citedByCount "37" @default.
• W2038372414 countsByYear W20383724142013 @default.
• W2038372414 countsByYear W20383724142014 @default.
• W2038372414 countsByYear W20383724142015 @default.
• W2038372414 countsByYear W20383724142016 @default.
• W2038372414 countsByYear W20383724142017 @default.
• W2038372414 countsByYear W20383724142018 @default.
• W2038372414 countsByYear W20383724142019 @default.
• W2038372414 countsByYear W20383724142020 @default.
• W2038372414 countsByYear W20383724142021 @default.
• W2038372414 countsByYear W20383724142022 @default.
• W2038372414 crossrefType "journal-article" @default.
• W2038372414 hasAuthorship W2038372414A5055159131 @default.
• W2038372414 hasAuthorship W2038372414A5061723353 @default.
• W2038372414 hasConcept C100460472 @default.
• W2038372414 hasConcept C105487726 @default.
• W2038372414 hasConcept C111368507 @default.
• W2038372414 hasConcept C127313418 @default.
• W2038372414 hasConcept C127413603 @default.
• W2038372414 hasConcept C136525101 @default.
• W2038372414 hasConcept C142724271 @default.
• W2038372414 hasConcept C147789679 @default.
• W2038372414 hasConcept C171250308 @default.
• W2038372414 hasConcept C17525397 @default.
• W2038372414 hasConcept C185592680 @default.
• W2038372414 hasConcept C192562407 @default.
• W2038372414 hasConcept C204787440 @default.
• W2038372414 hasConcept C2777289219 @default.
• W2038372414 hasConcept C2779227376 @default.
• W2038372414 hasConcept C42360764 @default.
• W2038372414 hasConcept C43617362 @default.
• W2038372414 hasConcept C49040817 @default.
• W2038372414 hasConcept C49110097 @default.
• W2038372414 hasConcept C51038369 @default.
• W2038372414 hasConcept C527607 @default.
• W2038372414 hasConcept C52859227 @default.
• W2038372414 hasConcept C71924100 @default.
• W2038372414 hasConcept C88380143 @default.
• W2038372414 hasConcept C89395315 @default.
• W2038372414 hasConceptScore W2038372414C100460472 @default.
• W2038372414 hasConceptScore W2038372414C105487726 @default.
• W2038372414 hasConceptScore W2038372414C111368507 @default.
• W2038372414 hasConceptScore W2038372414C127313418 @default.
• W2038372414 hasConceptScore W2038372414C127413603 @default.
• W2038372414 hasConceptScore W2038372414C136525101 @default.
• W2038372414 hasConceptScore W2038372414C142724271 @default.
• W2038372414 hasConceptScore W2038372414C147789679 @default.
• W2038372414 hasConceptScore W2038372414C171250308 @default.
• W2038372414 hasConceptScore W2038372414C17525397 @default.
• W2038372414 hasConceptScore W2038372414C185592680 @default.
• W2038372414 hasConceptScore W2038372414C192562407 @default.
• W2038372414 hasConceptScore W2038372414C204787440 @default.
• W2038372414 hasConceptScore W2038372414C2777289219 @default.
• W2038372414 hasConceptScore W2038372414C2779227376 @default.
• W2038372414 hasConceptScore W2038372414C42360764 @default.
• W2038372414 hasConceptScore W2038372414C43617362 @default.
• W2038372414 hasConceptScore W2038372414C49040817 @default.
• W2038372414 hasConceptScore W2038372414C49110097 @default.
• W2038372414 hasConceptScore W2038372414C51038369 @default.
• W2038372414 hasConceptScore W2038372414C527607 @default.
• W2038372414 hasConceptScore W2038372414C52859227 @default.
• W2038372414 hasConceptScore W2038372414C71924100 @default.
• W2038372414 hasConceptScore W2038372414C88380143 @default.
• W2038372414 hasConceptScore W2038372414C89395315 @default.
• W2038372414 hasIssue "2" @default.
• W2038372414 hasLocation W20383724141 @default.
• W2038372414 hasOpenAccess W2038372414 @default.

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