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• W2038372912 abstract "We designed a focused ion beam (FIB) machining system for fabricating three-dimensional (3-D) micro- and nano-structures. The system used an automatic sample stage that can tilt up to 93°. By tilting the sample stage, a pattern of the bridge width from the top direction and bridge height from the lateral direction is possible for machining 3-D structures. The exact size of the structures is etched by scanning the sample images from the top and lateral views. These etching methods using the first in situ FIB micromachining system showed many advantages for fabricating 3-D structures including transistor configuration." @default.
• W2038372912 created "2016-06-24" @default.
• W2038372912 creator A5013203533 @default.
• W2038372912 creator A5081731391 @default.
• W2038372912 date "2008-06-20" @default.
• W2038372912 modified "2023-09-27" @default.
• W2038372912 title "Development of Focused Ion Beam Machining Systems for Fabricating Three-Dimensional Structures" @default.
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• W2038372912 doi "https://doi.org/10.1143/jjap.47.5120" @default.
• W2038372912 hasPublicationYear "2008" @default.
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