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- W2038401306 abstract "The AuCriSiO2/InSb Metal-Oxide-Semiconductor capacitor was fabricated using photo-enhanced chemical vapor deposition. The electrical and structural properties were analyzed by capacitance-voltage and Auger electron spectroscopy , respectively. The high frequency (1 MHz) capacitance-voltage measurements were usually performed after positive or negative bias-temperature stressing. Both the flat-band voltage shift and the change of hysteresis of capacitance-voltage curve indicate the existence of enormous negative mobile charges in the bulk SiO2. Auger depth profile reveals that these negative mobile charges are metallic indium and antimony ions." @default.
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- W2038401306 date "1989-10-11" @default.
- W2038401306 modified "2023-10-18" @default.
- W2038401306 title "The Origin Of Instability In Metal/SiO 2 /InSb Capacitor Fabricated By Photo-Enhanced Chemical Vapor Deposition" @default.
- W2038401306 doi "https://doi.org/10.1117/12.960662" @default.
- W2038401306 hasPublicationYear "1989" @default.
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