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- W2038402571 abstract "The Ta/Mo interdiffusion gate technology was introduced into the gate-first FinFET process. The Ta/Mo gated n-MOS and the Mo gated p-MOS FinFET exhibited symmetrical Vth (0.31/-0.36 V), and the scalability down to 100 nm was demonstrated." @default.
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- W2038402571 date "2007-10-01" @default.
- W2038402571 modified "2023-10-16" @default.
- W2038402571 title "A Ta/Mo Interdiffusion Gate Technology for Dual Metal Gate-First FinFET Fabrication" @default.
- W2038402571 cites W2105917526 @default.
- W2038402571 doi "https://doi.org/10.1109/soi.2007.4357893" @default.
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