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Matches in SemOpenAlex for { <https://semopenalex.org/work/W2038440908> ?p ?o ?g. }

• W2038440908 endingPage "218" @default.
• W2038440908 startingPage "211" @default.
• W2038440908 abstract "The importance of surface reconstruction plus the generation of stress and electric fields at expanding islands during film formation are extremely important considerations for both surface cluster formation and ledge movement kinetics in the overall film deposition process. Using computer simulations and semi-empirical potential energy functions for Si and GaAs, both long-range field effects and cluster excess energy effects are demonstrated. Using a continuum approach with a ledge energy that depends on cluster radius, great differences relative to the classical nucleation picture are found. For vicinal surface orientations, an equation for film growth velocity is developed which incorporates gas phase transport, surface transport, ledge collection efficiency, ledge attachment kinetics and excess energy storage due to deposition stress and adsorbate trapping. The paper first treats the case of Si film formation from SiH4 in H2 with only SiH2 forming in the adlayer. It then extends the treatment to deal with other Si intermediates formed in the adlayer which then desorb into the gas phase. Finally, the treatment is extended to consider SiNx film formation from SiH4 + NH3 in H2." @default.
• W2038440908 created "2016-06-24" @default.
• W2038440908 creator A5027093650 @default.
• W2038440908 date "1992-11-01" @default.
• W2038440908 modified "2023-09-27" @default.
• W2038440908 title "Fundamental aspects of film nucleation and growth in chemical vapor deposition" @default.
• W2038440908 cites W1978021048 @default.
• W2038440908 cites W1983912717 @default.
• W2038440908 cites W2002796843 @default.
• W2038440908 cites W2008273321 @default.
• W2038440908 cites W2020147164 @default.
• W2038440908 cites W2076224949 @default.
• W2038440908 cites W2094623914 @default.
• W2038440908 cites W2109384700 @default.
• W2038440908 cites W28442029 @default.
• W2038440908 cites W3153328027 @default.
• W2038440908 doi "https://doi.org/10.1016/s0257-8972(09)90052-4" @default.
• W2038440908 hasPublicationYear "1992" @default.
• W2038440908 type Work @default.
• W2038440908 sameAs 2038440908 @default.
• W2038440908 citedByCount "0" @default.
• W2038440908 crossrefType "journal-article" @default.
• W2038440908 hasAuthorship W2038440908A5027093650 @default.
• W2038440908 hasConcept C110738630 @default.
• W2038440908 hasConcept C121332964 @default.
• W2038440908 hasConcept C121349320 @default.
• W2038440908 hasConcept C147789679 @default.
• W2038440908 hasConcept C150394285 @default.
• W2038440908 hasConcept C151730666 @default.
• W2038440908 hasConcept C159467904 @default.
• W2038440908 hasConcept C159985019 @default.
• W2038440908 hasConcept C162711632 @default.
• W2038440908 hasConcept C164866538 @default.
• W2038440908 hasConcept C171250308 @default.
• W2038440908 hasConcept C178790620 @default.
• W2038440908 hasConcept C185592680 @default.
• W2038440908 hasConcept C19067145 @default.
• W2038440908 hasConcept C191897082 @default.
• W2038440908 hasConcept C192562407 @default.
• W2038440908 hasConcept C195839 @default.
• W2038440908 hasConcept C199360897 @default.
• W2038440908 hasConcept C2776256949 @default.
• W2038440908 hasConcept C2779227376 @default.
• W2038440908 hasConcept C2816523 @default.
• W2038440908 hasConcept C41008148 @default.
• W2038440908 hasConcept C544956773 @default.
• W2038440908 hasConcept C57410435 @default.
• W2038440908 hasConcept C61048295 @default.
• W2038440908 hasConcept C64297162 @default.
• W2038440908 hasConcept C86803240 @default.
• W2038440908 hasConcept C95121573 @default.
• W2038440908 hasConcept C97355855 @default.
• W2038440908 hasConceptScore W2038440908C110738630 @default.
• W2038440908 hasConceptScore W2038440908C121332964 @default.
• W2038440908 hasConceptScore W2038440908C121349320 @default.
• W2038440908 hasConceptScore W2038440908C147789679 @default.
• W2038440908 hasConceptScore W2038440908C150394285 @default.
• W2038440908 hasConceptScore W2038440908C151730666 @default.
• W2038440908 hasConceptScore W2038440908C159467904 @default.
• W2038440908 hasConceptScore W2038440908C159985019 @default.
• W2038440908 hasConceptScore W2038440908C162711632 @default.
• W2038440908 hasConceptScore W2038440908C164866538 @default.
• W2038440908 hasConceptScore W2038440908C171250308 @default.
• W2038440908 hasConceptScore W2038440908C178790620 @default.
• W2038440908 hasConceptScore W2038440908C185592680 @default.
• W2038440908 hasConceptScore W2038440908C19067145 @default.
• W2038440908 hasConceptScore W2038440908C191897082 @default.
• W2038440908 hasConceptScore W2038440908C192562407 @default.
• W2038440908 hasConceptScore W2038440908C195839 @default.
• W2038440908 hasConceptScore W2038440908C199360897 @default.
• W2038440908 hasConceptScore W2038440908C2776256949 @default.
• W2038440908 hasConceptScore W2038440908C2779227376 @default.
• W2038440908 hasConceptScore W2038440908C2816523 @default.
• W2038440908 hasConceptScore W2038440908C41008148 @default.
• W2038440908 hasConceptScore W2038440908C544956773 @default.
• W2038440908 hasConceptScore W2038440908C57410435 @default.
• W2038440908 hasConceptScore W2038440908C61048295 @default.
• W2038440908 hasConceptScore W2038440908C64297162 @default.
• W2038440908 hasConceptScore W2038440908C86803240 @default.
• W2038440908 hasConceptScore W2038440908C95121573 @default.
• W2038440908 hasConceptScore W2038440908C97355855 @default.
• W2038440908 hasLocation W20384409081 @default.
• W2038440908 hasOpenAccess W2038440908 @default.
• W2038440908 hasPrimaryLocation W20384409081 @default.
• W2038440908 hasRelatedWork W1983510544 @default.
• W2038440908 hasRelatedWork W2008484253 @default.
• W2038440908 hasRelatedWork W2012593135 @default.
• W2038440908 hasRelatedWork W2035661665 @default.
• W2038440908 hasRelatedWork W2038440908 @default.
• W2038440908 hasRelatedWork W2047148882 @default.
• W2038440908 hasRelatedWork W2104328857 @default.
• W2038440908 hasRelatedWork W2157599343 @default.
• W2038440908 hasRelatedWork W2393077477 @default.
• W2038440908 hasRelatedWork W3180400085 @default.
• W2038440908 hasVolume "54-55" @default.
• W2038440908 isParatext "false" @default.
• W2038440908 isRetracted "false" @default.
• W2038440908 magId "2038440908" @default.

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