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- W2038453587 abstract "A complete process for field isolation, applicable to a 0.5 μm CMOS technology, has been developed using SILO process with Rapid Thermal Nitridation of Silicon (R.T.N.). Adequate isolation was achieved for 0.9 μm active area spacing and n+ to p+ distance of 2.0 μm with conventional diffused twin wells. Three p+ field doping processes were compared in terms of narrow width effect and reliability." @default.
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- W2038453587 date "1991-10-01" @default.
- W2038453587 modified "2023-09-27" @default.
- W2038453587 title "Optimisation of isolation for 0.5 μm CMOS technology using SILO process with R.T.N. of silicon" @default.
- W2038453587 doi "https://doi.org/10.1016/0167-9317(91)90302-t" @default.
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