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- W2038472287 abstract "To achieve high performance in a small form factor and to overcome Moore Law's by still achieving more transistors on microchips are through 2.5D and 3D chips stacking [1]. Through Si via (TSV) is the key to 2.5 D and 3D technology and is gaining more and more interest from many giant chipmakers [2]. Various defects may form during silicon etch in TSV due to the etching mechanism [3]." @default.
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- W2038472287 date "2014-12-01" @default.
- W2038472287 modified "2023-09-25" @default.
- W2038472287 title "Through silicon via (TSV) scallop smoothening technique" @default.
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- W2038472287 doi "https://doi.org/10.1109/eptc.2014.7028274" @default.
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