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- W2038565881 abstract "The quality of magnetron-sputtered TiNx coatings can vary significantly. The reasons for this must be sought in the coating process parameters and substrate conditions. A sensor developed for controlling in situ the coating parameters during the coating process should be a good tool for direct quality control and better process regulation. The construction of an eddy current sensor and measurement results will be discussed." @default.
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- W2038565881 title "TiNx magnetron sputter coating controlled by an in situ eddy current sensor" @default.
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- W2038565881 doi "https://doi.org/10.1016/0040-6090(94)90390-5" @default.
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