Matches in SemOpenAlex for { <https://semopenalex.org/work/W2038680598> ?p ?o ?g. }
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- W2038680598 endingPage "041105" @default.
- W2038680598 startingPage "041105" @default.
- W2038680598 abstract "This study investigates the shape transformation of 4H-SiC microtrenches that occurs during high-temperature hydrogen annealing, which is used to improve growth on such prepared substrates. The trenches have micron-sized widths and depths and were annealed in hydrogen ambient at temperatures of 1400–1600 °C for 30–3600 s. After hydrogen annealing, cross-sectional images of the samples were obtained by scanning electron microscopy (SEM). These SEM images reveal that the top and bottom trench corners become rounded during hydrogen annealing. The top trench corners become rounded by an etching reaction, whereas the bottom trench corners become rounded as a result of a regrowth phenomenon that involves the transportation of atoms. This study analyzes the mechanism of these transformations in terms of Mullins' continuum model. The results suggest that the evaporation–condensation process is dominant in the case of SiC annealing." @default.
- W2038680598 created "2016-06-24" @default.
- W2038680598 creator A5003625644 @default.
- W2038680598 creator A5032629167 @default.
- W2038680598 creator A5062615159 @default.
- W2038680598 creator A5069735484 @default.
- W2038680598 creator A5075887516 @default.
- W2038680598 creator A5085725578 @default.
- W2038680598 date "2009-04-20" @default.
- W2038680598 modified "2023-09-25" @default.
- W2038680598 title "Shape Transformation of 4H-SiC Microtrenches by Hydrogen Annealing" @default.
- W2038680598 cites W1963997411 @default.
- W2038680598 cites W1977096240 @default.
- W2038680598 cites W1977636150 @default.
- W2038680598 cites W1977702483 @default.
- W2038680598 cites W2011804974 @default.
- W2038680598 cites W2017334281 @default.
- W2038680598 cites W2019738037 @default.
- W2038680598 cites W2050818236 @default.
- W2038680598 cites W2056679357 @default.
- W2038680598 cites W2087340439 @default.
- W2038680598 doi "https://doi.org/10.1143/jjap.48.041105" @default.
- W2038680598 hasPublicationYear "2009" @default.
- W2038680598 type Work @default.
- W2038680598 sameAs 2038680598 @default.
- W2038680598 citedByCount "15" @default.
- W2038680598 countsByYear W20386805982012 @default.
- W2038680598 countsByYear W20386805982015 @default.
- W2038680598 countsByYear W20386805982016 @default.
- W2038680598 countsByYear W20386805982017 @default.
- W2038680598 countsByYear W20386805982018 @default.
- W2038680598 countsByYear W20386805982020 @default.
- W2038680598 countsByYear W20386805982022 @default.
- W2038680598 crossrefType "journal-article" @default.
- W2038680598 hasAuthorship W2038680598A5003625644 @default.
- W2038680598 hasAuthorship W2038680598A5032629167 @default.
- W2038680598 hasAuthorship W2038680598A5062615159 @default.
- W2038680598 hasAuthorship W2038680598A5069735484 @default.
- W2038680598 hasAuthorship W2038680598A5075887516 @default.
- W2038680598 hasAuthorship W2038680598A5085725578 @default.
- W2038680598 hasConcept C155310634 @default.
- W2038680598 hasConcept C159985019 @default.
- W2038680598 hasConcept C178790620 @default.
- W2038680598 hasConcept C185592680 @default.
- W2038680598 hasConcept C192562407 @default.
- W2038680598 hasConcept C26771246 @default.
- W2038680598 hasConcept C2777855556 @default.
- W2038680598 hasConcept C2779227376 @default.
- W2038680598 hasConcept C512968161 @default.
- W2038680598 hasConcept C8010536 @default.
- W2038680598 hasConceptScore W2038680598C155310634 @default.
- W2038680598 hasConceptScore W2038680598C159985019 @default.
- W2038680598 hasConceptScore W2038680598C178790620 @default.
- W2038680598 hasConceptScore W2038680598C185592680 @default.
- W2038680598 hasConceptScore W2038680598C192562407 @default.
- W2038680598 hasConceptScore W2038680598C26771246 @default.
- W2038680598 hasConceptScore W2038680598C2777855556 @default.
- W2038680598 hasConceptScore W2038680598C2779227376 @default.
- W2038680598 hasConceptScore W2038680598C512968161 @default.
- W2038680598 hasConceptScore W2038680598C8010536 @default.
- W2038680598 hasIssue "4" @default.
- W2038680598 hasLocation W20386805981 @default.
- W2038680598 hasOpenAccess W2038680598 @default.
- W2038680598 hasPrimaryLocation W20386805981 @default.
- W2038680598 hasRelatedWork W1512319868 @default.
- W2038680598 hasRelatedWork W2137307547 @default.
- W2038680598 hasRelatedWork W2196605515 @default.
- W2038680598 hasRelatedWork W2351696714 @default.
- W2038680598 hasRelatedWork W2380293314 @default.
- W2038680598 hasRelatedWork W2387616028 @default.
- W2038680598 hasRelatedWork W2943188944 @default.
- W2038680598 hasRelatedWork W3082440218 @default.
- W2038680598 hasRelatedWork W3144367999 @default.
- W2038680598 hasRelatedWork W4285802202 @default.
- W2038680598 hasVolume "48" @default.
- W2038680598 isParatext "false" @default.
- W2038680598 isRetracted "false" @default.
- W2038680598 magId "2038680598" @default.
- W2038680598 workType "article" @default.