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• W2038691438 abstract "Abstract BaMgF4 (BMF) films was deposited on p-Si by vacuum evaporation with substrate temperature in the range of 100–400 C. Films deposited at 100 C were amorphous and became polycrystalline at an annealing temperature of 600 C, whereas films deposited above 300 C were polycrystalline. X-ray diffraction shows the formation of orthorombic phase with a = 4.130 A, b = 5.189 A, and c = 14.510 A. The deposited BMF films have been encapsulated with various materials like ZrO2 and amorphous Si. The capacitance-voltage characteristics of MFS capacitors show hysteresis and the direction of hysteresis corresponds to ferroelectric polarization. The current-voltage characteristics of the MOSFETs show a threshold voltage shift which confirms the non-volatile memory behaviour." @default.
• W2038691438 created "2016-06-24" @default.
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• W2038691438 date "1994-06-01" @default.
• W2038691438 modified "2023-09-26" @default.
• W2038691438 title "Characteristics of barium magnesium fluoride (BMF) based MIS capacitors and mfsfets" @default.
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• W2038691438 doi "https://doi.org/10.1080/10584589408223881" @default.
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