FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2038737211> ?p ?o ?g. }

• W2038737211 endingPage "110" @default.
• W2038737211 startingPage "104" @default.
• W2038737211 abstract "Silicon surface etching and its dominant rate process are studied using hydrogen chloride gas in a wide concentration range of 1–100% in ambient hydrogen at atmospheric pressure in a temperature range of 1023–1423 K, linked with the numerical calculation accounting for the transport phenomena and the surface chemical reaction in the entire reactor. The etch rate, the gaseous products and the surface morphology are experimentally evaluated. The dominant rate equation accounting for the first-order successive reactions at silicon surface by hydrogen chloride gas is shown to be valid. The activation energy of the dominant surface process is evaluated to be 1.5 × 105 J mol− 1. The silicon deposition by the gaseous by-product, trichlorosilane, is shown to have a negligible influence on the silicon etch rate." @default.
• W2038737211 created "2016-06-24" @default.
• W2038737211 creator A5000515283 @default.
• W2038737211 creator A5001134032 @default.
• W2038737211 creator A5009955828 @default.
• W2038737211 creator A5022945705 @default.
• W2038737211 creator A5038583193 @default.
• W2038737211 creator A5077769295 @default.
• W2038737211 date "2005-10-01" @default.
• W2038737211 modified "2023-09-27" @default.
• W2038737211 title "Dominant rate process of silicon surface etching by hydrogen chloride gas" @default.
• W2038737211 cites W1588364977 @default.
• W2038737211 cites W1616475049 @default.
• W2038737211 cites W1964800166 @default.
• W2038737211 cites W1969088828 @default.
• W2038737211 cites W1973759016 @default.
• W2038737211 cites W1975781702 @default.
• W2038737211 cites W1981763136 @default.
• W2038737211 cites W1994503005 @default.
• W2038737211 cites W2002085045 @default.
• W2038737211 cites W2041537241 @default.
• W2038737211 cites W2044761972 @default.
• W2038737211 cites W2063203374 @default.
• W2038737211 cites W2063899318 @default.
• W2038737211 cites W2075132772 @default.
• W2038737211 cites W2076312461 @default.
• W2038737211 cites W2076623434 @default.
• W2038737211 cites W2077757052 @default.
• W2038737211 cites W2081046267 @default.
• W2038737211 cites W2094360844 @default.
• W2038737211 cites W2139728412 @default.
• W2038737211 cites W2170485121 @default.
• W2038737211 cites W2615064625 @default.
• W2038737211 cites W4244799192 @default.
• W2038737211 cites W4250681893 @default.
• W2038737211 doi "https://doi.org/10.1016/j.tsf.2005.04.121" @default.
• W2038737211 hasPublicationYear "2005" @default.
• W2038737211 type Work @default.
• W2038737211 sameAs 2038737211 @default.
• W2038737211 citedByCount "33" @default.
• W2038737211 countsByYear W20387372112012 @default.
• W2038737211 countsByYear W20387372112013 @default.
• W2038737211 countsByYear W20387372112014 @default.
• W2038737211 countsByYear W20387372112015 @default.
• W2038737211 countsByYear W20387372112016 @default.
• W2038737211 countsByYear W20387372112017 @default.
• W2038737211 countsByYear W20387372112018 @default.
• W2038737211 countsByYear W20387372112020 @default.
• W2038737211 countsByYear W20387372112021 @default.
• W2038737211 countsByYear W20387372112022 @default.
• W2038737211 countsByYear W20387372112023 @default.
• W2038737211 crossrefType "journal-article" @default.
• W2038737211 hasAuthorship W2038737211A5000515283 @default.
• W2038737211 hasAuthorship W2038737211A5001134032 @default.
• W2038737211 hasAuthorship W2038737211A5009955828 @default.
• W2038737211 hasAuthorship W2038737211A5022945705 @default.
• W2038737211 hasAuthorship W2038737211A5038583193 @default.
• W2038737211 hasAuthorship W2038737211A5077769295 @default.
• W2038737211 hasBestOaLocation W20387372112 @default.
• W2038737211 hasConcept C100460472 @default.
• W2038737211 hasConcept C113196181 @default.
• W2038737211 hasConcept C127413603 @default.
• W2038737211 hasConcept C147789679 @default.
• W2038737211 hasConcept C151730666 @default.
• W2038737211 hasConcept C178790620 @default.
• W2038737211 hasConcept C179104552 @default.
• W2038737211 hasConcept C185592680 @default.
• W2038737211 hasConcept C2779227376 @default.
• W2038737211 hasConcept C2779248272 @default.
• W2038737211 hasConcept C2781087020 @default.
• W2038737211 hasConcept C2816523 @default.
• W2038737211 hasConcept C33220542 @default.
• W2038737211 hasConcept C42360764 @default.
• W2038737211 hasConcept C512968161 @default.
• W2038737211 hasConcept C544956773 @default.
• W2038737211 hasConcept C64297162 @default.
• W2038737211 hasConcept C86803240 @default.
• W2038737211 hasConcept C95121573 @default.
• W2038737211 hasConceptScore W2038737211C100460472 @default.
• W2038737211 hasConceptScore W2038737211C113196181 @default.
• W2038737211 hasConceptScore W2038737211C127413603 @default.
• W2038737211 hasConceptScore W2038737211C147789679 @default.
• W2038737211 hasConceptScore W2038737211C151730666 @default.
• W2038737211 hasConceptScore W2038737211C178790620 @default.
• W2038737211 hasConceptScore W2038737211C179104552 @default.
• W2038737211 hasConceptScore W2038737211C185592680 @default.
• W2038737211 hasConceptScore W2038737211C2779227376 @default.
• W2038737211 hasConceptScore W2038737211C2779248272 @default.
• W2038737211 hasConceptScore W2038737211C2781087020 @default.
• W2038737211 hasConceptScore W2038737211C2816523 @default.
• W2038737211 hasConceptScore W2038737211C33220542 @default.
• W2038737211 hasConceptScore W2038737211C42360764 @default.
• W2038737211 hasConceptScore W2038737211C512968161 @default.
• W2038737211 hasConceptScore W2038737211C544956773 @default.
• W2038737211 hasConceptScore W2038737211C64297162 @default.
• W2038737211 hasConceptScore W2038737211C86803240 @default.
• W2038737211 hasConceptScore W2038737211C95121573 @default.
• W2038737211 hasIssue "1-2" @default.

• next