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• W2038767854 abstract "The operating conditions of a rf plasma ion source utilizing a positively biased electrode have been investigated to develop a stably operating, high-current ion source. Ion beam characteristics such as currents and energies are measured and compared with bias currents by varying the bias voltages on the electrode immersed in the ambient rf plasma. Current-voltage curves of the bias electrode and photographs confirm that a small and dense plasma, so-called anode spot, is formed near an extraction aperture and plays a key role to enhance the performance of the plasma ion source. The ion beam currents from the anode spot are observed to be maximized at the optimum bias voltage near the knee of the characteristic current-voltage curve of the anode spot. Increased potential barrier to obstruct beam extraction is the reason for the reduction of the ion beam current in spite of the increased bias current indicating the density of the anode spot. The optimum bias voltage is measured to be lower at higher operating pressure, which is favorable for stable operation without severe sputtering damage on the electrode. The ion beam current can be further enhanced by increasing the power for the ambient plasma without increasing the bias voltage. In the same manner, noble gases with higher atomic number as a feedstock gas are preferable for extracting higher beam current more stably. Therefore, performance of the plasma ion source with a positively biased electrode can be enhanced by controlling the operating conditions of the anode spot in various manners." @default.
• W2038767854 created "2016-06-24" @default.
• W2038767854 creator A5011268633 @default.
• W2038767854 creator A5073016636 @default.
• W2038767854 creator A5079898992 @default.
• W2038767854 creator A5087060279 @default.
• W2038767854 date "2011-12-01" @default.
• W2038767854 modified "2023-10-12" @default.
• W2038767854 title "Characterization of plasma ion source utilizing anode spot with positively biased electrode for stable and high-current ion beam extraction" @default.
• W2038767854 cites W1965056187 @default.
• W2038767854 cites W1976420029 @default.
• W2038767854 cites W1979245146 @default.
• W2038767854 cites W1982529593 @default.
• W2038767854 cites W1995550727 @default.
• W2038767854 cites W2012284367 @default.
• W2038767854 cites W2032227296 @default.
• W2038767854 cites W2032659118 @default.
• W2038767854 cites W2043433003 @default.
• W2038767854 cites W2057164458 @default.
• W2038767854 cites W2062520381 @default.
• W2038767854 cites W2113969739 @default.
• W2038767854 cites W2153011235 @default.
• W2038767854 doi "https://doi.org/10.1063/1.3664616" @default.
• W2038767854 hasPubMedId "https://pubmed.ncbi.nlm.nih.gov/22225211" @default.
• W2038767854 hasPublicationYear "2011" @default.
• W2038767854 type Work @default.
• W2038767854 sameAs 2038767854 @default.
• W2038767854 citedByCount "9" @default.
• W2038767854 countsByYear W20387678542012 @default.
• W2038767854 countsByYear W20387678542013 @default.
• W2038767854 countsByYear W20387678542014 @default.
• W2038767854 countsByYear W20387678542015 @default.
• W2038767854 countsByYear W20387678542017 @default.
• W2038767854 countsByYear W20387678542018 @default.
• W2038767854 countsByYear W20387678542019 @default.
• W2038767854 countsByYear W20387678542020 @default.
• W2038767854 crossrefType "journal-article" @default.
• W2038767854 hasAuthorship W2038767854A5011268633 @default.
• W2038767854 hasAuthorship W2038767854A5073016636 @default.
• W2038767854 hasAuthorship W2038767854A5079898992 @default.
• W2038767854 hasAuthorship W2038767854A5087060279 @default.
• W2038767854 hasConcept C107920040 @default.
• W2038767854 hasConcept C113196181 @default.
• W2038767854 hasConcept C119599485 @default.
• W2038767854 hasConcept C120665830 @default.
• W2038767854 hasConcept C121332964 @default.
• W2038767854 hasConcept C127413603 @default.
• W2038767854 hasConcept C145148216 @default.
• W2038767854 hasConcept C147789679 @default.
• W2038767854 hasConcept C165801399 @default.
• W2038767854 hasConcept C168834538 @default.
• W2038767854 hasConcept C171250308 @default.
• W2038767854 hasConcept C17525397 @default.
• W2038767854 hasConcept C178790620 @default.
• W2038767854 hasConcept C184779094 @default.
• W2038767854 hasConcept C185592680 @default.
• W2038767854 hasConcept C188224857 @default.
• W2038767854 hasConcept C19067145 @default.
• W2038767854 hasConcept C192562407 @default.
• W2038767854 hasConcept C20254490 @default.
• W2038767854 hasConcept C22423302 @default.
• W2038767854 hasConcept C2778220808 @default.
• W2038767854 hasConcept C43617362 @default.
• W2038767854 hasConcept C49040817 @default.
• W2038767854 hasConcept C50774322 @default.
• W2038767854 hasConcept C62520636 @default.
• W2038767854 hasConcept C82706917 @default.
• W2038767854 hasConcept C89395315 @default.
• W2038767854 hasConcept C93106096 @default.
• W2038767854 hasConceptScore W2038767854C107920040 @default.
• W2038767854 hasConceptScore W2038767854C113196181 @default.
• W2038767854 hasConceptScore W2038767854C119599485 @default.
• W2038767854 hasConceptScore W2038767854C120665830 @default.
• W2038767854 hasConceptScore W2038767854C121332964 @default.
• W2038767854 hasConceptScore W2038767854C127413603 @default.
• W2038767854 hasConceptScore W2038767854C145148216 @default.
• W2038767854 hasConceptScore W2038767854C147789679 @default.
• W2038767854 hasConceptScore W2038767854C165801399 @default.
• W2038767854 hasConceptScore W2038767854C168834538 @default.
• W2038767854 hasConceptScore W2038767854C171250308 @default.
• W2038767854 hasConceptScore W2038767854C17525397 @default.
• W2038767854 hasConceptScore W2038767854C178790620 @default.
• W2038767854 hasConceptScore W2038767854C184779094 @default.
• W2038767854 hasConceptScore W2038767854C185592680 @default.
• W2038767854 hasConceptScore W2038767854C188224857 @default.
• W2038767854 hasConceptScore W2038767854C19067145 @default.
• W2038767854 hasConceptScore W2038767854C192562407 @default.
• W2038767854 hasConceptScore W2038767854C20254490 @default.
• W2038767854 hasConceptScore W2038767854C22423302 @default.
• W2038767854 hasConceptScore W2038767854C2778220808 @default.
• W2038767854 hasConceptScore W2038767854C43617362 @default.
• W2038767854 hasConceptScore W2038767854C49040817 @default.
• W2038767854 hasConceptScore W2038767854C50774322 @default.
• W2038767854 hasConceptScore W2038767854C62520636 @default.
• W2038767854 hasConceptScore W2038767854C82706917 @default.
• W2038767854 hasConceptScore W2038767854C89395315 @default.
• W2038767854 hasConceptScore W2038767854C93106096 @default.
• W2038767854 hasIssue "12" @default.
• W2038767854 hasLocation W20387678541 @default.
• W2038767854 hasLocation W20387678542 @default.

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