FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2038835846> ?p ?o ?g. }

• W2038835846 endingPage "011003" @default.
• W2038835846 startingPage "011003" @default.
• W2038835846 abstract "As technology nodes continue to shrink, layout patterns become more sensitive to lithography processes, resulting in lithography hotspots that need to be identified and eliminated during physical verification. We propose an accurate hotspot detection approach based on principal component analysis-support vector machine classifier. Several techniques, including hierarchical data clustering, data balancing, and multilevel training, are provided to enhance the performance of the proposed approach. Our approach is accurate and more efficient than conventional time-consuming lithography simulation and provides a high flexibility for adapting to new lithography processes and rules." @default.
• W2038835846 created "2016-06-24" @default.
• W2038835846 creator A5011883763 @default.
• W2038835846 creator A5044285298 @default.
• W2038835846 creator A5051340429 @default.
• W2038835846 creator A5064213921 @default.
• W2038835846 creator A5087785977 @default.
• W2038835846 date "2014-11-04" @default.
• W2038835846 modified "2023-10-03" @default.
• W2038835846 title "Accurate lithography hotspot detection based on principal component analysis-support vector machine classifier with hierarchical data clustering" @default.
• W2038835846 cites W1556859836 @default.
• W2038835846 cites W1987429233 @default.
• W2038835846 cites W1993999542 @default.
• W2038835846 cites W2025250515 @default.
• W2038835846 cites W2032647444 @default.
• W2038835846 cites W2037552354 @default.
• W2038835846 cites W2055299283 @default.
• W2038835846 cites W2055375155 @default.
• W2038835846 cites W2057596653 @default.
• W2038835846 cites W2064086982 @default.
• W2038835846 cites W2068961782 @default.
• W2038835846 cites W2076305001 @default.
• W2038835846 cites W2087347434 @default.
• W2038835846 cites W2089689336 @default.
• W2038835846 cites W2093440842 @default.
• W2038835846 cites W2101703365 @default.
• W2038835846 cites W2113125366 @default.
• W2038835846 cites W2117532720 @default.
• W2038835846 cites W2119821739 @default.
• W2038835846 cites W2120442423 @default.
• W2038835846 cites W2121359873 @default.
• W2038835846 cites W2131676429 @default.
• W2038835846 cites W2144092555 @default.
• W2038835846 cites W2149602086 @default.
• W2038835846 cites W2161160262 @default.
• W2038835846 cites W2170802486 @default.
• W2038835846 cites W3099514962 @default.
• W2038835846 doi "https://doi.org/10.1117/1.jmm.14.1.011003" @default.
• W2038835846 hasPublicationYear "2014" @default.
• W2038835846 type Work @default.
• W2038835846 sameAs 2038835846 @default.
• W2038835846 citedByCount "32" @default.
• W2038835846 countsByYear W20388358462015 @default.
• W2038835846 countsByYear W20388358462016 @default.
• W2038835846 countsByYear W20388358462017 @default.
• W2038835846 countsByYear W20388358462018 @default.
• W2038835846 countsByYear W20388358462019 @default.
• W2038835846 countsByYear W20388358462020 @default.
• W2038835846 countsByYear W20388358462021 @default.
• W2038835846 countsByYear W20388358462022 @default.
• W2038835846 crossrefType "journal-article" @default.
• W2038835846 hasAuthorship W2038835846A5011883763 @default.
• W2038835846 hasAuthorship W2038835846A5044285298 @default.
• W2038835846 hasAuthorship W2038835846A5051340429 @default.
• W2038835846 hasAuthorship W2038835846A5064213921 @default.
• W2038835846 hasAuthorship W2038835846A5087785977 @default.
• W2038835846 hasConcept C12267149 @default.
• W2038835846 hasConcept C124101348 @default.
• W2038835846 hasConcept C127313418 @default.
• W2038835846 hasConcept C146481406 @default.
• W2038835846 hasConcept C153180895 @default.
• W2038835846 hasConcept C154945302 @default.
• W2038835846 hasConcept C192562407 @default.
• W2038835846 hasConcept C204223013 @default.
• W2038835846 hasConcept C27438332 @default.
• W2038835846 hasConcept C41008148 @default.
• W2038835846 hasConcept C49040817 @default.
• W2038835846 hasConcept C73555534 @default.
• W2038835846 hasConcept C8058405 @default.
• W2038835846 hasConcept C92835128 @default.
• W2038835846 hasConcept C95623464 @default.
• W2038835846 hasConceptScore W2038835846C12267149 @default.
• W2038835846 hasConceptScore W2038835846C124101348 @default.
• W2038835846 hasConceptScore W2038835846C127313418 @default.
• W2038835846 hasConceptScore W2038835846C146481406 @default.
• W2038835846 hasConceptScore W2038835846C153180895 @default.
• W2038835846 hasConceptScore W2038835846C154945302 @default.
• W2038835846 hasConceptScore W2038835846C192562407 @default.
• W2038835846 hasConceptScore W2038835846C204223013 @default.
• W2038835846 hasConceptScore W2038835846C27438332 @default.
• W2038835846 hasConceptScore W2038835846C41008148 @default.
• W2038835846 hasConceptScore W2038835846C49040817 @default.
• W2038835846 hasConceptScore W2038835846C73555534 @default.
• W2038835846 hasConceptScore W2038835846C8058405 @default.
• W2038835846 hasConceptScore W2038835846C92835128 @default.
• W2038835846 hasConceptScore W2038835846C95623464 @default.
• W2038835846 hasIssue "1" @default.
• W2038835846 hasLocation W20388358461 @default.
• W2038835846 hasOpenAccess W2038835846 @default.
• W2038835846 hasPrimaryLocation W20388358461 @default.
• W2038835846 hasRelatedWork W1579270119 @default.
• W2038835846 hasRelatedWork W2008302898 @default.
• W2038835846 hasRelatedWork W2008326590 @default.
• W2038835846 hasRelatedWork W2029718921 @default.
• W2038835846 hasRelatedWork W2358824780 @default.
• W2038835846 hasRelatedWork W2366390874 @default.
• W2038835846 hasRelatedWork W2380927352 @default.
• W2038835846 hasRelatedWork W3178621026 @default.

• next