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- W2038836507 abstract "A novel Si-based MOEMS acceleration seismic geophone, based on M-Z interferometry, is present in this paper. In one silicon chip, several elements including four silicon beams,seismic mass, a polarizer, M-Z waveguide interferometer and acousto-optic phase modulator are integrated. The working principle and the optimization structure design of the acceleration seismic geophone are given. The simulation result performed in FEM software ANSYS agrees with the theoretical analysis well. The main design parameters of the geophone system is as following: resonance frequency: 1353 Hz; phase detection sensitivity ΔΦ/a: 1.2×10<sup>-4</sup>rad/m/s<sup>2</sup>." @default.
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- W2038836507 date "2004-12-30" @default.
- W2038836507 modified "2023-10-17" @default.
- W2038836507 title "Structure design of Si-based M-Z interference acceleration seismic geophone" @default.
- W2038836507 doi "https://doi.org/10.1117/12.573534" @default.
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